Ultralow-Loss Etchless Lithium Niobate Integrated Photonics at Near-Visible Wavelengths

Yue Yu,Zejie Yu,Lai Wang,Xiankai Sun

DOI: https://doi.org/10.1002/adom.202100060

IF: 9

2021-01-01

Advanced Optical Materials

Abstract:We developed an ultralow-loss etchless lithium niobate integrated photonic platform at near-visible wavelengths (765–781 nm) and experimentally achieved a maximal intrinsic Q factor of 1.1 × 10 6 in disk microcavities at ~765 nm.

What problem does this paper attempt to address?

High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

Ziliang Ruan,Kaixuan Chen,Zong Wang,Xuancong Fan,Ranfeng Gan,Lu Qi,Yiwei Xie,Changjian Guo,Zhonghua Yang,Naidi Cui,Liu Liu

DOI: https://doi.org/10.1002/lpor.202200327

2023-01-01

LASER & PHOTONICS REVIEWS

Abstract:Silicon nitride (SiN) emerges as an important platform for ultralow loss photonic integrations with complementary metal-oxide-semiconductor compatibility. However, active devices, such as modulators, are difficult to realize on pure SiN due to the lack of any electro-optic (EO) properties of the material. Here, an SiN and lithium niobate (LN) heterogenous integration platform supporting high-performance EO modulators on SiN waveguide circuits is introduced. An efficient evanescent coupling structure is realized for low-loss light transitions between the SiN waveguide and the LN ridge waveguide with a measured mode transition loss of only 0.4 dB. Based on this heterogeneous platform, an EO Mach-Zender interference modulator on SiN is built with unprecedented loss, efficiency, and bandwidth performances. A half-wave voltage of 4.3 V with a modulation bandwidth of 37 GHz and an overall insertion loss of 1 dB is measured for a 7-mm long device. Data transmission up to 128 Gb s(-1) with a bit-error-rate of <2.4 x 10(-4) is also demonstrated.
Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Renhong Gao,Haisu Zhang,Fang Bo,Wei Fang,Zhenzhong Hao,Ni Yao,Jintian Lin,Jianglin Guan,Li Deng,Min Wang,Lingling Qiao,Ya Cheng

DOI: https://doi.org/10.1088/1367-2630/ac3d52

2021-01-01

New Journal of Physics

Abstract:Microresonators of ultrahigh quality (Q) factors represent a crucial type of photonic devices aiming at ultra-high spectral resolution, ultra-high sensitivity to the environmental perturbations, and efficient nonlinear wavelength conversions at low threshold pump powers. Lithium niobate on insulator (LNOI) microdisks of high Q factors are particularly attractive due to its large second-order nonlinear coefficient and strong electro-optic property. In this letter, we break through the long standing bottleneck in achieving the Q factors of LNOI microresonators beyond 108, which approaches the intrinsic material absorption limit of lithium niobate (LN). The ultra-high Q factors give rise to a rich family of nonlinear optical phenomena from optical parametric oscillation (OPO) to harmonics generation with unprecedented characteristics including ultra-low pump threshold, high wavelength conversion efficiency, and ultra-broad operation bandwidth. Specifically, the threshold of OPO is measured to be only 19.6 μW, and the absolute conversion efficiency observed in the second harmonic generation reaches 23%. The record-breaking performances of the on-chip ultra-high Q LNOI microresonators will have profound implication for both photonic research and industry.
Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Renhong Gao,Haisu Zhang,Fang Bo,Wei Fang,Zhenzhong Hao,Ni Yao,Jintian Lin,Jianglin Guan,Li Deng,Min Wang,Lingling Qiao,Ya Cheng

2021-01-01

Abstract:State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China. XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China. State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. The MOE Key Laboratory of Weak Light Nonlinear Photonics, TEDA Applied Physics Institute and School of Physics, Nankai University, Tianjin 300457, China. State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China. University of Chinese Academy of Sciences, Beijing 100049, China. Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China. Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China. Shanghai Research Center for Quantum Sciences, Shanghai 201315, China. These authors contributed equally to the work.
Ultra-Low Loss Lithium Niobate Photonics

Qiao Lingling,Wang Min,Wu Rongbo,Fang Zhiwei,Lin Jintian,Chu Wei,Cheng Ya

DOI: https://doi.org/10.3788/aos202141.0823012

2021-01-01

Abstract:We report fabrication and characterization of ultra-low loss optical waveguides and optical micro-resonators on lithium niobate on insulator with excellent surface qualities. We demonstrate innovative and high-performance applications and/or devices ranging from nonlinear optics and electrically tunable optomechanics to microcombs and integrated circuits.
Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator

Mian Zhang,Cheng Wang,Rebecca Cheng,Amirhassan Shams-Ansari,Marko Loncar

DOI: https://doi.org/10.1364/OPTICA.4.001536

2017-12-13

Abstract:We demonstrate an ultralow loss monolithic integrated lithium niobate photonic platform consisting of dry-etched subwavelength waveguides. We show microring resonators with a quality factor of 10$^7$ and waveguides with propagation loss as low as 2.7 dB/m.

Optics,Mesoscale and Nanoscale Physics
Ultra-high-Q Photonic Crystal Nanobeam Cavity for Etchless Lithium Niobate on Insulator (LNOI) Platform

Zhi Jiang,Cizhe Fang,Xu Ran,Yu Gao,Ruiqing Wang,Jianguo Wang,Danyang Yao,Xuetao Gan,Yan Liu,Yue Hao,Genquan Han

DOI: https://doi.org/10.29026/oea.2025.240114

IF: 8.9329

2024-01-01

Opto-Electronic Advances

Abstract:The expansive spectral coverage and superior optical properties of lithium niobate (LN) offer a comprehensive suite of tools for exploring novel functionalities. Achieving high-quality (Q) photonic resonator cavities is crucial for enhancing light-matter interactions. However, this task is challenging as the device performance is heavily dependent on the fabrication quality of the LN. In this paper, we present experimental validation of an etchless approach to fabricating high-Q photonic crystal nanobeam cavities (PCNBCs). We successfully fabricate PCNBCs with Q factors exceeding 105 while maintaining high transmittance by capitalizing on the low waveguide loss and high fabrication tolerance of TE-polarized mode. Remarkably, the Q factor achieved here exceeds previous reports on etchless LN PCNBCs by over an order of magnitude. Benefiting from this advancement, we further explore a variety of optical functions, including thermo-optic tuning, optically induced bistability, and Fano line shapes generation. These findings present promising prospects for a versatile platform technique, facilitating the development of high-performance electro-optic or acousto-optic modulators, optical logic devices, and quantum photonics, highlighting its significant impact in the field of photonic integration.
Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Chuntao Li,Jianglin Guan,Jintian Lin,Renhong Gao,Min Wang,Lingling Qiao,Li Deng,Ya Cheng

2023-06-18

Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Optics,Applied Physics
Wafer-scale low-loss lithium niobate photonic integrated circuits

Kevin Luke,Prashanta Kharel,Christian Reimer,Lingyan He,Marko Loncar,Mian Zhang

DOI: https://doi.org/10.1364/OE.401959

2020-07-03

Abstract:Thin-film lithium niobate (LN) photonic integrated circuits (PICs) could enable ultrahigh performance in electro-optic and nonlinear optical devices. To date, realizations have been limited to chip-scale proof-of-concepts. Here we demonstrate monolithic LN PICs fabricated on 4- and 6-inch wafers with deep ultraviolet lithography and show smooth and uniform etching, achieving 0.27 dB/cm optical propagation loss on wafer-scale. Our results show that LN PICs are fundamentally scalable and can be highly cost-effective.

Applied Physics,Optics
High Q Nanobeam Cavity Based on Etchless Lithium Niobate Integrated Platform

Jiaxin Zhang,Weixi Liu,Bingcheng Pan,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1109/icocn53177.2021.9563667

2021-01-01

Abstract:Photonic bound states in the continuum (BICs) applied in the thin-film lithium-niobate-on-insulator (LNOI) has been exploited in multiple systems since it obviates the limitations of nano-fabrication. Here we firstly propose a nanobeam structure with BIC exhibiting a high Q factor of over 7000 with the length of only ~100 μm.
Ultra-low loss photonic circuits in Lithium Niobate On Insulator

Inna Krasnokutska,Jean-Luc J. Tambasco,Xijun Li,Alberto Peruzzo

DOI: https://doi.org/10.1364/OE.26.000897

2017-08-21

Abstract:Lithium Niobate on insulator (LNOI) photonics promises to combine the excellent nonlinear properties of Lithium Niobate with the high complexity achievable by high contrast waveguides. However, to date, fabrication challenges have resulted in high-loss and sidewall-angled waveguides, limiting its applicability. We report LNOI single mode waveguides with ultra low propagation loss of 0.4 dB/cm and sidewall angle of 75°. Our results open the route to a highly efficient photonic platform with applications ranging from high-speed telecommunication to quantum technology.

Applied Physics,Materials Science,Optics,Quantum Physics
Surface acoustic microwave photonic filters on etchless lithium niobate integrated platform

Yue Yu,Xiankai Sun

DOI: https://doi.org/10.48550/arXiv.2209.07840

2022-09-16

Abstract:Lithium niobate on insulator emerges as a promising platform for integrated microwave photonics because of its capability of ultralow-loss guidance and high-efficiency modulation of light. Chip-level integration of microwave filters is important for signal processing in the 5G/6G wireless communication. Here, we employed the principle of bound states in the continuum for low-loss waveguiding on an etchless lithium niobate integrated platform, and realized high-performance microwave photonic filters thereon. These microwave photonic filters consist of a high-quality photonic microcavity modulated by piezoelectrically excited surface acoustic waves. Acoustic time delays from 21 to 106 ns and passbands with bandwidth as narrow as 0.89 MHz were achieved in the fabricated filters operating at gigahertz frequencies. Our demonstration may open up new applications on the lithium niobate integrated platform, such as optical communication, signal processing, and beam steering.

Optics,Applied Physics
High density lithium niobate photonic integrated circuits

Zihan Li,Rui Ning Wang,Grigory Lihachev,Junyin Zhang,Zelin Tan,Mikhail Churaev,Nikolai Kuznetsov,Anat Siddharth,Mohammad J Bereyhi,Johann Riemensberger,Tobias J Kippenberg

DOI: https://doi.org/10.1038/s41467-023-40502-8

2023-08-10

Abstract:Photonic integrated circuits have the potential to pervade into multiple applications traditionally limited to bulk optics. Of particular interest for new applications are ferroelectrics such as Lithium Niobate, which exhibit a large Pockels effect, but are difficult to process via dry etching. Here we demonstrate that diamond-like carbon (DLC) is a superior material for the manufacturing of photonic integrated circuits based on ferroelectrics, specifically LiNbO3. Using DLC as a hard mask, we demonstrate the fabrication of deeply etched, tightly confining, low loss waveguides with losses as low as 4 dB/m. In contrast to widely employed ridge waveguides, this approach benefits from a more than one order of magnitude higher area integration density while maintaining efficient electro-optical modulation, low loss, and offering a route for efficient optical fiber interfaces. As a proof of concept, we demonstrate a III-V/LiNbO3 based laser with sub-kHz intrinsic linewidth and tuning rate of 0.7 PHz/s with excellent linearity and CMOS-compatible driving voltage. We also demonstrated a MZM modulator with a 1.73 cm length and a halfwave voltage of 1.94 V.
Integrated Lithium Niobate Platform for Nonlinear Optics and Electro-Optic Applications

Cheng Wang,Mian Zhang,Xiao Xiong,Brian Stern,Vivek Venkataraman,Xi-Feng Ren,Guang-Can Guo,Michal Lipson,Marko Lončar

DOI: https://doi.org/10.1364/nlo.2017.ntu1a.2

2017-01-01

Nonlinear Optics

Abstract:We demonstrate an integrated lithium niobate platform with sub-wavelength light confinement and low propagation loss (3dB/cm). We show efficient second harmonic generation in phase-matched waveguides (41% W−1cm−2), as well as high-speed electro-optic modulation (40 Gbps).
High-efficiency Thin-Film Lithium Niobate Modulator with Highly Confined Optical Modes

Nuo Chen,Yalong Yu,Kangping Lou,Qingjiao Mi,Tao Chu

DOI: https://doi.org/10.1364/ol.481827

2023-01-01

Abstract:We demonstrate a low-loss, high-efficiency lithium niobate electro-optic (EO) modulator with optical isolation trenches to achieve stronger field confinement and reduced light absorption loss. The proposed modulator realized considerable improvements, including a low half-wave voltage-length product of 1.2 V center dot cm, an excess loss of similar to 2.4 dB, and a broad 3-dB EO bandwidth of over 40 GHz. We developed a lithium niobate modulator with, to the best of our knowledge, the highest reported modulation efficiency of any Mach-Zehnder interferometer (MZI) modulator. (c) 2023
300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production

Xuguang Zhang,Yuxin Liang,Yujun Chen,Bitao Shen,Jiahui Huang,Chenghao Lao,Yichen Wu,Zhihui Li,Dapeng Liu,Haowen Shu,Weiwei Hu,Xingjun Wang,Naidi Cui,Lin Chang

DOI: https://doi.org/10.1063/5.0221409

IF: 4

2024-01-01

Applied Physics Letters

Abstract:Silicon nitride (Si3N4) photonic integrated circuits are rapidly developing in recent decades. The low loss of Si3N4 attracts significant attention and facilitates a wide range of applications in integrated photonics. In this work, we demonstrate the foundry fabrication of a 300-nm-thick 8-in. wafer-scale Si3N4 platform, with a microresonator intrinsic quality factor of up to 15x106, corresponding to an ultralow loss of 2.2 dB/m. Leveraging this platform, we develop a mature process design kit, achieving a single-mode waveguide propagation loss of less than 5 dB/m, an edge coupler loss of 1.3 dB, and an insertion loss of 0.07 dB for multimode interference couplers. Utilizing the processed Si3N4 chip, we realize a hybrid integrated tunable external cavity laser with a tuning range from 1534 to 1602 nm, a record-high side-mode suppression ratio of up to 76 dB, an optical power of 26 mW, and an intrinsic linewidth of down to 314 Hz. Our work lays a solid foundation for the further development of applications, including nonlinear optics, quantum optics, optical communications, and ranging.
Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Rongbo Wu,Min Wang,Jian Xu,Jia Qi,Wei Chu,Zhiwei Fang,Jianhao Zhang,Junxia Zhou,Lingling Qiao,Zhifang Chai,Jintian Lin,Ya Cheng

DOI: https://doi.org/10.3390/nano8110910

2018-11-06

Abstract:In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.
Ultrahigh-Q lithium niobate microring resonator with multimode waveguide.

Chuangchuang Wei,Jianguo Liu,Dechen Li,Qianqian Jia,Jinye Li

DOI: https://doi.org/10.1364/ol.489387

IF: 3.6

2023-04-13

Optics Letters

Abstract:Difficulty in etching lithium niobate (LN) results in a relatively high propagation loss, which necessitates sophisticated processes to fabricate high-quality factor (Q) microresonators. Here, we fabricate a multimode microring resonator with an intrinsic Q of 6 × 106, which exhibits a propagation loss 50 times lower than that of a single-mode LN microring fabricated under the same process. Notably, the excitation of higher-order modes in the multimode microring is effectively suppressed by utilizing the Euler bend. The highly regular transmission spectrum of the resonator demonstrates a free spectral range (FSR) of 56 GHz. Based on this microresonator, we implement a bandpass microwave photonic filter with an ultra-narrow 3 dB bandwidth of 47.5 MHz and a large tuning range of 2-26.5 GHz. It can be anticipated that the combination of existing advanced etching techniques with this work will drive the propagation loss of a LN waveguide closer to the material absorption loss, significantly facilitating the optimization of performance in applications requiring ultrahigh-Q LN microresonators, such as frequency combs, frequency conversion, electro-optic modulation, and quantum photonics.

Physics,Engineering,Medicine
Compact lithium niobate photonic integrated circuits

Yan Gao,Fuchuan Lei,Marcello Girardi,Zhichao Ye,Raphaël Van Laer,Victor Torres-Company,Jochen Schröder

2023-03-02

Abstract:Lithium niobate (LN) is a promising material for future complex photonic-electronic circuits, with wide applications in fields like communications, sensing, quantum optics, and computation. LN took a great stride toward compact photonic integrated circuits (PICs) with the development of partially-etched LN on insulator (LNOI) waveguides. However, integration density is still limited for future high-compact PICs due to the partial edge nature of their waveguides. Here, we demonstrate a fully-etched LN PIC platform which, for the first time, simultaneously achieves ultra-low propagation loss and compact circuit size. The tightly-confined fully-etched LN waveguides with smooth sidewalls allow us to bring the bending radius down to 20 $\mu$m (corresponds to 1 THz FSR). We have achieved compact high-$Q$ microring resonators with $Q/V$ of 7.1 $\times$ 10$^{4}$ $\mu$m$^{-3}$, almost one order of magnitude larger than previous demonstrations. The statistical mean propagation losses of our LN waveguides is 8.5 dB/m (corresponds to mean $Q$-factor of 4.9 $\times$ 10$^{6}$) even with a small bending radius of 40 $\mu$m. Our compact and ultra-low-loss LN platform shows great potential in future miniaturized multifunctional integration systems. As complementary evidence to show the utility of our platform, we demonstrate soliton microcombs with an ultra-high repetition rate of 500 GHz in LN.

Optics,Applied Physics
Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Jinming Chen,Zhaoxiang Liu,Yuan Zhou,Haisu Zhang,Zhiwei Fang,Lvbin Song,Guanhua Wang,Chao Sun,Min Wang,Ya Cheng

DOI: https://doi.org/10.1109/lpt.2022.3176972

IF: 2.6

2022-06-01

IEEE Photonics Technology Letters

Abstract:Lithium niobate (LiNbO3, LN) on insulator (LNOI) is a promising material platform for integrated photonics to realize high-capacity and high-speed information communication. Here, we developed the 515 nm femtosecond laser micro-machining technique with a 316 nm processing accuracy and demonstrated the fabrication of monolithically integrated waveguide-coupled micro-resonators with the quality factors (Q) of $1.8 imes 10^{5}$ using 515 nm femtosecond laser ablation assisted ions beam etching (IBE) process. The chemical–mechanical polishing (CMP) is adopted to smoothing the etched edge of the hard mask patterned by femtosecond laser ablation. These fabrication techniques are compatible with high efficiency and high precision wafer-scale production, without counting on the UV/E-beam lithography technique, which is essential for LN photonic devices moving towards industrial applications.

engineering, electrical & electronic,optics,physics, applied
Ultrabroadband Low-Crosstalk Dense Lithium Niobate Waveguides by Floquet Engineering

Zhiyuan Lin,Wange Song,Jiacheng Sun,Xueyun Li,Chunyu Huang,Shengjie Wu,Haoran Xin,Shining Zhu,Tao Li

DOI: https://doi.org/10.1103/physrevapplied.20.054005

IF: 4.6

2023-01-01

Physical Review Applied

Abstract:Integrated photonic chips have gradually become a significant option for information transmission and processing, in which the integration density will play an increasingly important role similar to that witnessed in integrated circuits. To date, great efforts have been made for silicon-on-insulator wafers to achieve dense integration with low crosstalk, although it remains quite challenging in the emerging lithium-niobate-on-insulator (LNOI) platform. Here, we report a strategy utilizing Floquet-mode-index modulation to realize broadband zero crosstalk with minimal impact on other performance metrics on the LNOI chips. The underlying physics of zero crosstalk is attributed to the collapse of the Floquet quasienergy, which is further experimentally verified by ultrabroadband low-crosstalk transmissions with low excess loss. Moreover, we demonstrate broadband eight-channel light transmissions in a compact LNOI waveguide array, showing an advantage over the conventional ones in comparison. Our work provides an alternative approach for improving the integration density of on-chip photonic circuits, opening up different possibilities for dense waveguide applications in the promising LNOI platform.

Ultralow-Loss Etchless Lithium Niobate Integrated Photonics at Near-Visible Wavelengths

High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Ultra-Low Loss Lithium Niobate Photonics

Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator

Ultra-high-Q Photonic Crystal Nanobeam Cavity for Etchless Lithium Niobate on Insulator (LNOI) Platform

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Wafer-scale low-loss lithium niobate photonic integrated circuits

High Q Nanobeam Cavity Based on Etchless Lithium Niobate Integrated Platform

Ultra-low loss photonic circuits in Lithium Niobate On Insulator

Surface acoustic microwave photonic filters on etchless lithium niobate integrated platform

High density lithium niobate photonic integrated circuits

Integrated Lithium Niobate Platform for Nonlinear Optics and Electro-Optic Applications

High-efficiency Thin-Film Lithium Niobate Modulator with Highly Confined Optical Modes

300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production

Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Ultrahigh-Q lithium niobate microring resonator with multimode waveguide.

Compact lithium niobate photonic integrated circuits

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Ultrabroadband Low-Crosstalk Dense Lithium Niobate Waveguides by Floquet Engineering