Abstract:The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices, including low-voltage, high-speed modulators, electro-optic frequency combs, and microwave-optical transducers. Yet to date, LiNbO3 photonic integrated circuits (PICs) have mostly been fabricated using non-standard etching techniques that lack the reproducibility routinely achieved in silicon photonics. Widespread future application of thin-film LiNbO3 requires a reliable and scalable solution using standard processing and precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO3 photonic platform that overcomes the abovementioned challenges by employing wafer-scale bonding of thin-film LiNbO3 to planarized low-loss silicon nitride (Si3N4) photonic integrated circuits, a mature foundry-grade integrated photonic platform. The resulting devices combine the substantial Pockels effect of LiNbO3 with the scalability, high-yield, and complexity of the underlying Si3N4 PICs. Importantly, the platform maintains the low propagation loss (<0.1 dB/cm) and efficient fiber-to-chip coupling (<2.5 dB per facet) of the Si3N4 waveguides. We find that ten transitions between a mode confined in the Si3N4 PIC and the hybrid LiNbO$_3$ mode produce less than 0.8 dB additional loss, corresponding to a loss per transition not exceeding 0.1 dB. These nearly lossless adiabatic transitions thus link the low-loss passive Si3N4 photonic structures with electro-optic components. We demonstrate high-Q microresonators, optical splitters, electrically tunable photonic dimers, electro-optic frequency combs, and carrier-envelope phase detection of a femtosecond laser on the same platform, thus providing a reliable and foundry-ready solution to low-loss and complex LiNbO3 integrated photonic circuits.

Integrated Lithium Niobate Platform for Nonlinear Optics and Electro-Optic Applications

High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

A Lithium Niobate-Si3n4 Platform on Silicon by Heterogeneous Wafer Bonding

Heterogeneous Integration of Lithium Niobate and Silicon Nitride Waveguides for Wafer-Scale Photonic Integrated Circuits on Silicon.

Sub-Micron Periodically-Poled Lithium Niobate Waveguide For Integrated Nonlinear Optics

A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

Ultra-broadband and Low-Loss Edge Coupler for Highly Efficient Second Harmonic Generation in Thin-Film Lithium Niobate

Second harmonic generation in nano-structured thin-film lithium niobate waveguides

Naturally Phase Matched Lithium Niobate Nanocircuits for Integrated Nonlinear Photonics

Ultrabroadband nonlinear optics in nanophotonic periodically poled lithium niobate waveguides

Integrated III-V/Lithium Niobate Nonlinear Laser

Efficient second-harmonic generation of quasi-bound states in the continuum in lithium niobate thin film enhanced by Bloch surface waves

Silicon rich nitride-lithium niobate on insulator platform for photonics integrated circuits

Resonant Nonlinear Nanostructured Grating in an Unstructured Lithium Niobate on Insulator Platform

Efficient second harmonic generation by harnessing bound states in the continuum in semi-nonlinear etchless lithium niobate waveguides