Liquid Phase Epitaxy Magnetic Garnet Films and Their Applications

Yi-Heng Rao,Huai-Wu Zhang,Qing-Hui Yang,Dai-Nan Zhang,Li-Chuan Jin,Bo Ma,Yu-Juan Wu
DOI: https://doi.org/10.1088/1674-1056/27/8/086701
2018-01-01
Chinese Physics B
Abstract:Liquid phase epitaxy (LPE) is a mature technology. Early experiments on single magnetic crystal films fabricated by LPE were focused mainly on thick films for microwave and magneto-optical devices. The LPE is an excellent way to make a thick film, low damping magnetic garnet film and high-quality magneto-optical material. Today, the principal challenge in the applied material is to create sub-micrometer devices by using modern photolithography technique. Until now the magnetic garnet films fabricated by LPE still show the best quality even on a nanoscale (about 100 nm), which was considered to be impossible for LPE method.
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