General Testing Method for Refractive Surfaces Based on Reverse Hartmann Test

Ping Xu,Daodang Wang,Zhidong Gong,Zhongmin Xie,Rongguang Liang,Ming Kong,Jun Zhao,Linhai Mo,Shuhui Mo
DOI: https://doi.org/10.1117/12.2273189
2017-01-01
Abstract:The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.
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