Surface Modification of Chalcogenide Glasses by N-2 Plasma Treatment

GR Chen,Z Hu,J Xu,JJ Cheng
DOI: https://doi.org/10.1016/s0022-3093(01)00642-1
IF: 4.458
2001-01-01
Journal of Non-Crystalline Solids
Abstract:Surface modification of chalcogenide glasses by N-2 plasma treatment was investigated in the present paper. Two glasses, Ge30As10Se60 and AS(2)S(3), were studied and a microwave plasma apparatus equipped with a high-purity nitrogen gas source was used. The effects of N2 plasma treatment on surface strengthening of chalcogenide glasses were shown by increased microhardness. Explanations are based on a N+ implantation effect and bonding of active neutral N atoms from the plasma with sputtered elements from the glass surface. They also account for the much greater effect of N+ plasma treatment than that of the N ions implantation in increasing the microhardness of similar chalcogenide glasses. A comparison of X-ray photoelectron spectrometer (XPS) spectra for the Ge(25)AS(15)Se(60) glass sample, before and after N, plasma treatment provides further support for the mechanism suggested. (C) 2001 Elsevier Science B.V. All rights reserved.
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