320 x 256 long wavelength infrared focal plane arrays based on type- II InAs/GaSb superlattice

Xu Jia-Jia,Chen Jian-Xin,Zhou Yi,Xu Qing-Qing,Wang Fang-Fang,Xu Zhi-Cheng,Bai Zhi-Zhong,Jin Chuan,Chen Hong-Lei,Ding Rui-Jun,He Li
DOI: https://doi.org/10.3724/SP.J.1010.2014.00598
2014-01-01
JOURNAL OF INFRARED AND MILLIMETER WAVES
Abstract:The growth and fabrication of a 320 x 256 type- II InAs/GaSb superlattice long wavelength infrared focal plane array detector were reported. The superlattice material was grown on GaSb substrate using molecular beam epitaxy (MBE) technology with a PBlN structure. The structure of infrared absorption layer is 14 ML ( InAs) /7 ML( GaSb), the focal plane array had a pixel size of 27 mu m x 27 mu m and a pitch of 30 mu m. The device fabrication process consisted of mesa dry etching, side-wall passivation, metallization and flip-chip hybridization with readout integrated circuit (RO-IC). At 77 K, the detector had a 100% cut-off wavelength of 10.5 mu m, and a peak detectivity of 8.41 x 10(9) cmHz(1/2) W-1. Concept proof of infrared imaging was also demonstrated with the focal plane array at liquid nitrogen temperature.
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