128×128 Infrared Focal Plane Arrays Based on Type-II InAs/GaSb Superlattice

Xu Jia-Jia,Jin Ju-Peng,Xu Qing-Qing,Xu Zhi-Cheng,Jin Chuan,Zhou Yi,Chen Hong-Lei,Lin Chun,Chen Jian-Xin,He Li
DOI: https://doi.org/10.3724/sp.j.1010.2012.00501
2012-01-01
JOURNAL OF INFRARED AND MILLIMETER WAVES
Abstract:In this paper, we reported the growth and fabrication of a 128 x 128 infrared focal plane array detector made of type-II InAs/GaSb superlattice. The superlattice structure was grown on GaSb substrate using molecular beam epitaxy (MBE) technology. It consisted of 200 periods of 13ML(InAs)/9ML(GaSb) for longwave infrared detection. The pixel of the detector had a conventional PIN structure with a size of 40 mu m x 40 mu m. The device fabrication process consisted of mesa etching, side-wall passivation, metallization and flip-chip hybridization with readout integrated circuit (ROIC). At 77 K, the detector had a 100% cut-off wavelength of 8.0 mu m, and a peak detectivity of 6.0 x 10(9) cmHz(1/2) W-1. Concept proof of infrared imaging was also demonstrated with the focal plane array at liquid nitrogen temperature.
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