Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching

Li Huan,Yang Cheng-Ao,Xie Sheng-Wen,Huang Shu-Shan,Chai Xiao-Li,Zhang Yu,Wagn Jin-Liang,Niu Zhi-Chuan
DOI: https://doi.org/10.11972/j.issn.1001-9014.2018.02.003
2018-01-01
JOURNAL OF INFRARED AND MILLIMETER WAVES
Abstract:GaSb-based laterally coupled distributed feedback (LC-DFB) quantum well lasers with a wavelength of 2 mu m were successfully prepared. Second order Bragg gratings are fabricated by holographic lithography and inductively coupled plasma etching (ICP). The etching conditions for grating preparation are optimized and a single longitudinal mode lasing at room temperature is obtained. The room temperature peak power output per facet exceeds 5 mW with a maximum side-mode suppression ratio of more than 24 dB.
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