1.3 Μm 10-Wavelength Laterally Coupled Distributed Feedback Laser Array with High-Duty-Ratio Gratings

Ankang Li,Jian Wang,Changzheng Sun,Yaqiong Wang,Shuhan Yang,Bing Xiong,Yi Luo,Zhibiao Hao,Yanjun Han,Lai Wang,Hongtao Li
DOI: https://doi.org/10.1002/pssa.201800490
2018-01-01
Abstract:A 1.3 mu m 10-wavelength laterally coupled distributed feedback (LC-DFB) laser array is realized by high-duty-ratio lateral gratings along both sides of the ridges on one AlGaInAs multiple quantum well (MQW) epi-wafer for Fabry-Perot lasers. The coupling coefficient is enhanced by adjusting the depth and duty ratio of lateral grating, and CH4/H-2/Ar reactive ion etching (RIE) which provides high selectivity between InP and AlInAs is adopted for precise control of the grating depth. The stable single-mode operation of 10 wavelengths is demonstrated with the mean wavelength spacing of approximate to 3.4 nm and the average side mode suppression ratio (SMSR) approximate to 40.8 dB.
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