The mechanisms of nanoindentation creep in Al thin metal films

F. Wang,P. Huang,K. W. Xu
2007-01-01
Abstract:Constant loading rate/load creep experiments were conducted on polycrystalline Al thin films using a nanoindentation instrument. It showed that the loading mode had a great effect on the creep properties. Total creep and the stress exponent increased with increasing loading rate/load. It is postulated that the release of plastic deformation which should have released during loading segment induced high creep rate. And the change of total creep and stress exponent depend on the amount of plastic deformation under different loading conditions.
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