Abstract:Microstructures of silicon induced by pulsed laser irradiation were investigated. Microstructure evolution induced by two different laser configurations (lasers with wave length of 355 nm and 532 nm) was characterized by scanning electron microscopy. The measurement results show that periodic structure and villous structure were fabricated on silicon surface by varying the intensity of the applied lasers under atmospheric conditions. Regardless of the laser configurations used, it is found that the used laser intensity plays an important role in the microstructure formation. At low laser intensity, the main character of the irradiated surface is periodic ripples and the period of ripple structure is about 400 nm. Villus structure is the main feature formed with the increase of laser intensity. The mechanism of the villus formation induced by laser irradiation was proposed. Based on the experimental results, the clusters induced by laser irradiation recombine with each other and grow under the increase of laser intensity. During irradiation, the induced plasma expanded upward from the target surface. The clusters and ions in the plume collided with each other. Besides, the collision also happened between molecules of air and the clusters originated from target. As a result of numerous collisions, neutral molecules were dissociated into polarized nanoclusters. The induced nanoclusters redeposited on the target surface. The clusters recombine with each other and adhere to protuberance on the surface. This process results in the formation of cluster-assembled villous microstructure. The optical character of the irradiated samples was measured by FT-IR spectroscopy, and the transmission spectra were analyzed.

Laser-induced Periodic Surface Structure in Silicon Wafer Irradiated by Continuous Laser

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Periodic Surface Structures on Dielectrics Upon Femtosecond Laser Pulses Irradiation.

Study of Femtosecond Laser Induced Periodic Structure on Amorphous Silicon Films and Crystallization Characteristics

Coherence effects in LIPSS formation on silicon wafers upon picosecond laser pulse irradiations

Continuous Modulations of Femtosecond Laser-Induced Periodic Surface Structures and Scanned Line-Widths on Silicon by Polarization Changes

Ultrafast Dynamics of Femtosecond Laser-Induced High Spatial Frequency Periodic Structures on Silicon Surfaces

Picosecond Laser-Induced Periodic Surface Structures (LIPSS) on Crystalline Silicon

Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser.

Functional Performance of Silicon with Periodic Surface Structures Induced by Femtosecond Pulsed Laser

Extremely Regular Periodic Surface Structures in a Large Area Efficiently Induced on Silicon by Temporally Shaped Femtosecond Laser

Femtosecond Laser Induced Concentric Semi-Circular Periodic Surface Structures on Silicon Based on the Quasi-Plasmonic Annular Nanostructure.

Simulation of Femtosecond Laser-Induced Periodic Surface Structures on Fused Silica by Considering Intrapulse and Interpulse Feedback

Uniformity Control of Laser-Induced Periodic Surface Structures

Microstructure Evolution And Ft-Ir Spectra Of Silicon Induced By Pulsed Laser Irradiation

Formation of Laser-Induced Periodic Surface Nanometric Concentric Ring Structures on Silicon Surfaces Through Single-Spot Irradiation with Orthogonally Polarized Femtosecond Laser Double-Pulse Sequences

Polarization-Dependent Anisotropy of LIPSSs' Morphology Evolution on a Single-Crystal Silicon Surface

The Role of the Laser-Induced Oxide Layer in the Formation of Laser-Induced Periodic Surface Structures

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Femtosecond Laser Induced Surface Structuring on Silicon by Diffraction-Assisted Micropatterning

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation