Abstract:High spatial frequency laser induced periodic surface structures (HSFLs) on silicon substrates are often developed on flat surfaces at low fluences near ablation threshold of 0.1 J/cm2, seldom on microstructures or microgrooves at relatively higher fluences above 1 J/cm2. This work aims to enrich the variety of HSFLs-containing hierarchical microstructures, by femtosecond laser (pulse duration: 457 fs, wavelength: 1045 nm, and repetition rate: 100 kHz) in liquids (water and acetone) at laser fluence of 1.7 J/cm2. The period of Si-HSFLs in the range of 110-200 nm is independent of the scanning speeds (0.1, 0.5, 1 and 2 mm/s), line intervals (5, 15 and 20 μm) of scanning lines and scanning directions (perpendicular or parallel to light polarization direction). It is interestingly found that besides normal HSFLs whose orientations are perpendicular to the direction of light polarization, both clockwise or anticlockwise randomly tilted HSFLs with a maximal deviation angle of 50° as compared to those of normal HSFLSs are found on the microstructures with height gradients. Raman spectra and SEM characterization jointly clarify that surface melting and nanocapillary waves play important roles in the formation of Si-HSFLs. The fact that no HSFLs are produced by laser ablation in air indicates that moderate melting facilitated with ultrafast liquid cooling is beneficial for the formation of HSFLs by LALs. On the basis of our findings and previous reports, a synergistic formation mechanism for HSFLs at high fluence was proposed and discussed, including thermal melting with the concomitance of ultrafast cooling in liquids, transformation of the molten layers into ripples and nanotips by surface plasmon polaritons (SPP) and second-harmonic generation (SHG), and modulation of Si-HSFLs direction by both nanocapillary waves and the localized electric field coming from the excited large Si particles.

Study of Femtosecond Laser Induced Periodic Structure on Amorphous Silicon Films and Crystallization Characteristics

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

Laser-induced Periodic Surface Structure in Silicon Wafer Irradiated by Continuous Laser

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Polarization-Dependent Anisotropy of LIPSSs' Morphology Evolution on a Single-Crystal Silicon Surface

Femtosecond Laser-Induced Mesoporous Structures on Silicon Surface

Direct observation and quantification of nanosecond laser induced amorphization inside silicon

Deposition and Melting Behaviors for Formation of Micro/nano Structures from Nanostructures with Femtosecond Pulses

Femtosecond Laser Induced Nanocone Structure and Simultaneous Crystallization of 1.6 Μm Amorphous Silicon Thin Film for Photovoltaic Application

Molecular Dynamics Simulations of Pulsed Laser Crystallization of Amorphous Silicon Ultrathin Films

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Hierarchical Anti-Reflective Laser-Induced Periodic Surface Structures (lipsss) on Amorphous Si Films for Sensing Applications

Effect of Crystallographic Orientation on Structural Response of Silicon to Femtosecond Laser Irradiation

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

Hierarchical Microstructures with High Spatial Frequency Laser Induced Periodic Surface Structures Possessing Different Orientations Created by Femtosecond Laser Ablation of Silicon in Liquids

Femtosecond Laser-Induced Crystallization of Amorphous Silicon Thin Films under a Thin Molybdenum Layer

Femtosecond Laser Nanostructuring on a 4H-Sic Surface by Tailoring the Induced Self-Assembled Nanogratings

Light Intensity Distribution in Laser Interference Crystallization and the Fabrication of Two-Dimensional Periodic Nanocrystalline Silicon Array

Deep Investigation of Two-Dimensional Structure Arrays Formed on Si Surface

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation