3 D Orientation Imaging with Transmission Electron Microscopy

Soren Schmidt,Haihua Liu,Andy Godfrey,Henning Poulsen,Xiaoxu Huang
2012-01-01
Abstract:We present a novel methodology for obtaining 3 D orientation maps with spatial resolution of 1 nm in foils with few hundreds nm thickness. The method utilizes Transmission Electron Microscopy(TEM) in conical dark field scanning mode for data acquisition, where images are collected over a wide range of beam and sample tilts. The reconstruction algorithms are based on existing orientation imaging software for use with 3 DXRD(Three dimensional X-ray Diffraction) microscopy. The methodology, algorithms and examples are presented along with potential applications.
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