Characterization of Optical Properties and Thermo-Optic Effect for Non-Polar AlGaN Thin Films Using Spectroscopic Ellipsometry
Shuai Chen,Xiong Zhang,Aijie Fan,Hu Chen,Cheng Li,Zhe Chuan Feng,Jiadong Lyu,Zhe Zhuang,Guohua Hu,Yiping Cui
DOI: https://doi.org/10.1088/1361-6463/ab77e2
2020-01-01
Abstract:The non-polar a-plane (11 (2) over bar 20) AlGaN thin films with various Al compositions were grown successfully on the r-plane ( 2 (2) over bar 04) semi-polar sapphire substrates using the continuous growth, two-way pulsed-flow, and three-way pulsed-flow growth methods, respectively with metal-organic chemical vapor deposition. The optical properties and thermo-optic effect of these films were studied extensively for the first time with angle- and temperature-dependent spectroscopic ellipsometry (SE) under both isotropic and anisotropic fitting modes. The SE fitting results for the energy band-gap, the layer thickness, and the surface roughness of the non-polar GaN, AlGaN, and AlN thin films were found to be comparable or even consistent quite well with the characterization results of high-resolution x-ray diffraction, ultraviolet-visible absorption spectroscopy, and atomic force microscopy. It was revealed that the non-polar AlGaN has higher refractive index than its polar counterpart with the same Al composition, and the non-polar AlGaN with the lowest surface roughness could be achieved with the three-way pulsed-flow growth method. Moreover, it was demonstrated that the anisotropy for the non-polar AlGaN thin film increased with increasing the Al composition. These characterization results should be useful for the fabrication of the non-polar AlGaN-based high-temperature power and ultraviolet-polarized optoelectronic devices utilizing thermo-optical effect and optical anisotropy.