Investigation of the fluidized bed-chemical vapor deposition ( FB-CVD ) process using CFD-DEM method

Malin Liu,Rongzheng Liu,Yuanyun Wen,Bing Liu,Youlin Shao
2014-01-01
Abstract:The CFD-DEM-CVD multiscale coupling simulation concept was proposed based on the mass/momentum/energy transfer involved in the FB-CVD process. The pyrolysis process of the reaction gas in the spouted bed can be simulated by CFD method, then the concentration field and velocity field can be extracted and coupled with the particle movement behavior which can be simulated by DEM. Particle deposition process can be described by the CVD model based on particle position, velocity and neighboring gas concentration. This multiscale coupling method can be implemented in the Fluent-EDEM software with their UDF (User Definition Function) and API (Application Programming Interface). Base on the multiscale coupling concept, the criterion for evaluating FB-CVD process is given. At first, the volume in the coating furnace is divided into two parts (active coating area and non-active coating area) based on simulation results of chemical pyrolysis process. Then the residence time of all particles in the active coating area can be obtained using the CFD-DEM simulation method. The residence time distribution can be used as a criterion for evaluating the gas-solid contact efficiency and operation performance of the coating furnace. At last different coating parameters of the coating furnace are compared based on the proposed criterion. And also, the future research emphasis is discussed.
What problem does this paper attempt to address?