Abstract:Mechanical properties of MEMS materials, the influence on mechanical properties by micromachining process, size effects on microactuators and microrobots were studied. Design and micromachining principles of silicon and thin films as MEMS structure material were proposed from mechanics' point of view. According to the minimum defect rule, MEMS structure should be as small as possible, and traditional machining process should be avoided. From the minimum stress rule, sharp angles should be avoided, and heat treatment should be applied. The maximum isolation rule indicated that hard cover films for contact surface were necessary in MEMS movable parts. Mechanical properties of thin films were closely related with the growing processes and the post treatment processes, therefore test structures were recommend for parameter determination. Size effects of electrostatic, piezoelectric, electromagnetic and SMA actuators were analyzed and synthesized. The output forces of most actuators were proportional to L 2 while the output forces of piezoelectric actuators were proportional to L 1, therefore micro piezoelectric actuators were the best actuators for MEMS. Dynamic properties of artificial ants, micro airplanes and artificial fishes in micro scales were studied. The required driving forces for artificial ants, micro airplanes, and artificial fishes were proportional to L 3, L 3, and L 4. It is concluded that microrobots could be driven to creep, fly and swim when their sizes were small enough. This work provided a theoretical base on design and fabrication of complex MEMS devices such as microrobots.

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