Electrostatically Actuated Microgripper Based on Silicon Bulk Micromachining

李勇,李玉和,李庆祥,訾艳阳
DOI: https://doi.org/10.3321/j.issn:1004-924x.2003.01.001
2003-01-01
Optics and Precision Engineering
Abstract:The characteristics of an electrostatically actuated comb-drive microgripp er were tested with its information and status acquired using the t est platfor m of Microscope-CCD-micro-computer. The voltage-d isplacement characteristic was obtained through image processing and analysis. The analysis of the characteristic equation deduced from miscellaneous factors indicates that the theoretical design is rational and consistent with the experimental results. The differenc e between theoretical design and practical device is discussed with the desig n rule, fabrication and experiment process taken into consideration. The causati on demonstrates that present theoretical design and fabrication technology need further improvement to meet the design requirements for micro-electromechanical devices.
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