Microgripper Based on Silicon Bulk Micromachining

李勇,李玉和,李庆祥,訾艳阳

DOI: https://doi.org/10.3321/j.issn:1000-0054.2003.05.021

2003-01-01

Abstract:An electrostatically actuated microgripper was designed with improved force output and gripping motion. A model of the Sshaped flexible fingers was solved using the finite element method for analysis of the structure, the modal and the electric field. A high aspect ratio microgripper with Sshaped flexible fingers was fabricated using silicon bulk micromachining. A gripper finger 5.470 mm in equivalent length was then successfully released. The electroconductive gripper fingers were connected to ground to release the electric charges on the finger surfaces. Continuous Sshaped flexures in the fingers reduce the gripping arm stiffness, solve the contradiction between the huge elastic modulus and the small surface electrostatic force and increase the force output of the microgripper.