Method for analyzing influence of OHS transport system on micro-vibration of VLSI structure

Ming-yi HU,Yu LOU,Jian-guo NIE,Liu CHEN,Shuo DOU,Wei HUANG
DOI: https://doi.org/10.3969/j.issn.1003-5060.2016.06.019
2016-01-01
Abstract:During the industrial manufacture of very large scale integrated circuit (VLSI) ,Over Hang System(OHS) is very important part of the clean technology system .However ,many precision de-vices are generally densely distributed in the industrial plant which is characterized with complex structure type ,micro-vibration made by OHS operation will do harm to the manufacture ,so it is nec-essary to create reasonable and effective analysis method for micro-vibration control design .In this pa-per ,based on the linear transfer characteristic and the engineering test data ,the simplified model of vibration energy closure is built ,and the analysis method for the micro-vibration control of OHS sys-tem is proposed and then illustrated by the application in real project .The results show that the meth-od ,in accordance with engineering requirement at present ,is easy to be carried out ,and it provides a reliable method to solve the influence of OHS system .
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