Comparison and Correction of Errors Caused by Radial Phase-Shifting Nonuniformity of Test Optics in Multi-Step Phase-Shifting

Gao Fen,Ni Jinping,Li Bing,Tian Ailing
DOI: https://doi.org/10.3788/aos201838.0412002
2018-01-01
Abstract:Errors causesd by radial phase-shifting nonuniformity of test optics arc different when using different steps of phase-shifting algorithms to process interference fringes. Here, a error analysis model is established based on optical principle of point diffraction interferometery. Take 5, 6, 7 and 13 step phase-shifting algorithms as example, phase-shifting errors which arc directly caused by radial phase-shifting nonuniformity arc first analyzed, and then be introduced into the interferometry model. The influence of this phase-shifting error to final optical surface testing results arc analyzed later and a new polynomial error correction method based on error preestimate is proposed. The analysis results show that the more the phase-shifting steps arc, the larger the figure error caused by radial phase-shifting nonuniformity is. Each of these figure error shows a paraboloid like distribution. Also, removing the defocus item from Zernike polynomial of final optical surface testing results is equal to have had a quadratic polynomial correction of this error. If the numerical aperture of test optics arc no more than 0.3, the error caused by radial phase-shifting nonuniformity can be ignored after the quadratic polynomial correction.
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