A Wheeled Horizontal Dual-Axis MEMS Gyroscope Based on Single Proof Mass with Mechanical Coupling Suppression Silicon Gratings

Haibing Yang,Jian Cui,Qiancheng Zhao

DOI: https://doi.org/10.1109/mems46641.2020.9056355

2020-01-01

Abstract:This paper reports a wheeled horizontal dual-axis MEMS gyroscope based on single proof mass with mechanical coupling suppression silicon gratings. By applying a voltage across the silicon grating and the bottom suppression electrode, the electrostatic force generated by the overlap can suppress the off-plane displacement of the horizontal axis gyroscope caused by fabrication error without the angular rate input. The method uses the DC voltage to structurally suppress the quadrature error of the horizontal axis gyroscope, which can greatly simplify the subsequent circuit design. The results show that the resonant frequency of the driving mode of the wheeled horizontal dual-axis gyroscope is 6423.881 Hz, the resonant frequency of the X-axis sensing mode is 6684.785 Hz, and the resonant frequency of the Y-axis sensing mode is 6741.823 Hz. The silicon coupling suppression gratings can effectively suppress the orthogonally coupled signals of the horizontal axis gyroscope, wherein the X-axis coupling signal is reduced by 134 times and the Y-axis coupling signal is reduced by 51 times.