Mismatch of Ferroelectric Film on Negative Capacitance FETs Performance

Yuhua Liang,Zhangming Zhu,Xueqing Li,Sumeet Kumar Gupta,Suman Datta,Vijaykrishnan Narayanan
DOI: https://doi.org/10.1109/ted.2020.2968050
2020-01-01
Abstract:In this article, we analyze the impact of process variations of the ferroelectric film on the performance of the negative capacitance field-effect transistor (NCFET). Variations of the ferroelectric layer area (resulting from the variation of the transistor dimension sizes and the edge-effect), the ferroelectric layer thickness, the polarization, and the coercivity are taken into consideration to evaluate the impact on the NCFET performance. These results can serve as a guideline to improve both the circuit performance and yield for analog and digital circuits. To showcase this ability, the influence of these variations on the oscillating frequency of a five-stage ring oscillator and the mirroring current of a current mirror are analyzed. The results show that the distribution of the standard derivation of the oscillating frequency is 1.9 MHz on condition of T-FE = 14 nm, W-P/L-P = 1 mu m/45 nm, and W-N/L-N = 500/45 nm, and the standard derivation of the mirroring current is 0.17 mu A on condition of W = 1 mu m, L = 500 nm, and T-FE = 20 nm.
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