Palladium Sensitive Thin Film on Micro Hotplate for Fast Response/Recovery

Qi Liu,Zhuoqing Yang,Guifu Ding
DOI: https://doi.org/10.1109/nems.2019.8915670
2019-01-01
Abstract:We innovatively design a palladium (Pd) film hydrogen sensor by sputtering a layer of serpentine Pd sensitive resistance wire on suspended micro hotplate. The working temperature of the sensor is regulated by energizing platinum (Pt) resistance wire of the micro hotplate to obtain fast response/recovery. Under room temperature, the response and recovery time of Pd film sensor are about 6 min/5 min. While at elevated temperature, rapid and sharp decline of resistance appears when the sensitive resistance wire contacts with hydrogen gas. The reason for this phenomenon has been proposed through surface observation. Then, we put forward that the reason is the change of sensitive mechanism when Pd film integrated with the suspended structure. With suspended platform, redox reaction of Pd is easy to occur. When the temperature of the sensitive area is 400°C, the response value (S) is -1.8% within 5 s for 2000 ppm H 2 and reaches to -0.3% within 1.5 s for 200 ppm H 2 .
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