Abstract:The diamond microchannel heat sink has attracted much attention recently owing to its excellent heat dissipation performance. However, the difficulty in processing expected microchannels on the self-supporting diamond substrate and the high price restrict its applications. In this paper, a new strategy is proposed to prepare diamond microchannels, that is, depositing diamond microchannels on a micro-grooved graphite substrate with a Mo nucleation layer. The effects of micro-grooves width on the deposition environment, structure, and diamond growth process are investigated by combining the experiments and numerical simulations. The results show that the electric field intensity at the center of the micro-groove bottom is the lowest, which increases gradually with the increase of the micro-groove width. This variation affects the diamond deposition in the micro-grooves. With the rise of the micro-groove width, the deposition form of the carbon atoms in the plasma translates from sp2 to sp3. The films deposited at the bottom center of the micro-grooves change from graphene nanosheets to a mixture of graphite and diamond, and then to well-crystallized diamond. The morphology of the diamond films translates from the graphite, and nanocrystalline diamond co-existed globular clusters to (110) oriented microcrystalline pyramid diamond grains with a rectangular top, and then to (111) oriented holonomic pyramid grains. Similar continuous and dense diamond films can also be obtained at the micro-groove top when the micro-groove width is over 630 μm. The investigation in this paper indicates that this new strategy is feasible and promising in manufacturing diamond microchannel heat sinks.

Thinning Strategy of Substrates for Diamond Growth with Reduced PCD Rim: Design and Experiments

Study on the Simulation and Experimental Impact of Substrate Holder Design on 3-Inch High-Quality Polycrystalline Diamond Thin Film Growth in a 2.45 GHz Resonant Cavity MPCVD

Homoepitaxial lateral growth of single-crystal diamond with eliminating PCD rim and enlarging surface area

Early stages of polycrystalline diamond deposition: Laser reflectance at substrates with growing nanodiamonds

Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification

Homoepitaxy Growth of Single Crystal Diamond under 300 torr Pressure in the MPCVD System

Recent progress in homoepitaxial single-crystal diamond growth via MPCVD

Vertical-Substrate MPCVD Epitaxial Nanodiamond Growth

Growth and morphological studies of (100) textured diamond thin films by microwave plasma-enhanced chemical vapor deposition

Effects of the electric field at the edge of a substrate to deposit a Ø100 mm uniform diamond film in a 2.45 GHz MPCVD system

Enhanced deposition rate of polycrystalline CVD diamond at high microwave power densities

High-speed growth of high-quality polycrystalline diamond films by MPCVD

Growth of diamond microchannels on micro-grooved graphite substrate by MPCVD

High quality CVD single crystal diamonds grown on nanorods patterned diamond seed

Morphological and Structural Evolution on the Lateral Face of the Diamond Seed by MPCVD Homoepitaxial Deposition

MPCVD Diamond Lateral Growth Through Microterraces to Reduce Threading Dislocations Density

Nanocrystalline Diamond Film Grown by Pulsed Linear Antenna Microwave CVD

Thickness Impact on the Morphology, Strain Relaxation and Defects of Diamond Heteroepitaxially Grown on Ir/Al2O3 Substrates

The Growth And Interface Characteristics Of Diamond Films On Cemented Carbide Substrates

Overgrowth of Single Crystal Diamond Using Defect-Selective Etching and Epitaxy Technique in Chemical Vapor Deposition

The effects of self-assembling off-angles on the homoepitaxial lateral outward growth of single-crystal diamond