Pressureless Low-Temperature Sintering of Plasma Activated Ag Nanoparticles for High-Power Device Packaging

Hui Fang,Chenxi Wang,Te Wang,Hong Wang,Shicheng Zhou,Yilong Huang,Yanhong Tian
DOI: https://doi.org/10.1016/j.matlet.2019.126620
IF: 3
2019-01-01
Materials Letters
Abstract:A controllable plasma-activated method to achieve pressureless sintering of Ag nanoparticles is proposed for low-temperature bonding. O-2 plasma activation is employed to effectively decompose organics coated on the nanoparticles prior to sintering, avoiding the loose interfacial microstructures. Therefore, robust bonding Cu-Cu joints with high shear strength (>20 MPa) can be formed at a low temperature of 200 degrees C without requiring additional pressure. This rapid and controllable activation method significantly enhances the sinterability of the Ag particles, leading to a dense microstructure. The improved thermal conductivity is three times higher than the one prepared without plasma activation. (C) 2019 Elsevier B.V. All rights reserved.
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