A P-Si/n-gan Diode Fabricated by Nanomembrane Lift-off and Transfer-Print Technique

Yang Liu,Lai Wang,Lei Wang,Xingzhao Wu,Zhibiao Hao,Jiadong Yu,Yi Luo,Changzheng Sun,Yanjun Han,Bing Xiong,Jian Wang,Hongtao Li
DOI: https://doi.org/10.1088/1361-6641/ab408b
IF: 2.048
2019-01-01
Semiconductor Science and Technology
Abstract:In this paper, we successfully demonstrated a high quality p-Si/n-GaN heterojunction diode through van der Waals bonding implemented by nanomembrane lift-off and transfer-print technique. A nanoscale native oxide layer is observed at the interface by transmission electron microscope, which plays a role as passivation-layer. The heterojunction diode has excellent electrical performance with a high rectification ratio of 4.75 x 10(5) at +/- 3 V and a low reverse dark current density of 4.03 x 10(-4) A cm(-2) at -3 V. In addition, the heterojunction diode responds to both near ultraviolet (375.6 nm) and red light (650 nm) with responsivity of 429.9 mA W-1 and 66.8 mA W-1 (at -3 V) respectively. This result indicates that a large-lattice-mismatched semiconductor heterojunction can be fabricated based on GaN by using transfer-print technique, thereby expanding the operating band of GaN-based detectors from ultraviolet region to visible region.
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