Abstract:A novel piezoelectric XY platform driven by a single actuator was presented for a large travel range and compact structure. The actuator operated at the inertial mechanism and moved the output platform step-by-step. A dynamic model of the piezoelectric actuator was established based on the Timoshenko beam theory and Galerkin procedure, which was used to aid the structure design. The dynamic model of the platform system was established based on the dynamic model of the actuator and the LuGre friction model. A prototype was fabricated and its experimental system was established; the total size was 100 × 100 × 93.5 mm3 and the travel range was 15 × 15 mm2. The measured stepper motions agreed well with the simulation results, and the correctness of the dynamic model was confirmed. The proposed platform achieved maximum speeds of 2.13 and 3.11 mm/s along the axes X and Y , respectively, and a carrying capacity of 20 kg was achieved. Furthermore, the closed-loop control experiments, including the positioning resolution and the sinusoidal trajectory tracking, were carried out, and a positioning resolution better than [Formula: see text] and a tracking error rate of 4% were achieved, which revealed the potential of the proposed piezoelectric platform in field of manipulating heavy objects with submicrometer accuracy and large travel range, especially for some specific fields including microparticle manipulation, ultraprecision manufacturing, and optical device posture adjustment where large travel range, high accuracy, and multidimension are expected.

Modeling and Experimental Evaluations of a Four-Legged Stepper Rotary Precision Piezoelectric Stage

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Design and Experimental Evaluation of a Novel Stepping Linear Piezoelectric Actuator

Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation

A Purely Centered and Non-Redundant Piezoelectric Stick-Slip Rotary Stage with Force Amplification

Design and Experimental Evaluation of a Stepper Piezoelectric Actuator Using Bending Transducers.

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Design, Modeling, and Experimental Evaluation of a Compact Piezoelectric XY Platform for Large Travel Range.

Design, analysis and experimental performance of a stepping type piezoelectric linear actuator based on compliant foot driving

Design and Experiments of a Single-Foot Linear Piezoelectric Actuator Operated in a Stepping Mode

A Four-Foot Walking-Type Stepping Piezoelectric Actuator: Driving Principle, Simulation and Experimental Evaluation

A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion.

Design of a Linear Walking Stage Based on Two Types of Piezoelectric Actuators

Design and Experimental Study of a Stepping Piezoelectric Actuator with Large Stroke and High Speed

Development and Experiment Evaluation of an H-shape Linear Piezoelectric Actuator Operated in Stepping Mode

A Non-Resonant Sandwich Type Bidirectional Stepping Piezoelectric Actuator Driven by Oblique Two-Dimensional Trajectory: Design, Analysis and Experiment Evaluation

A Novel U-shaped Stepping Linear Piezoelectric Actuator with Two Driving Feet and Low Motion Coupling: Design, Modeling and Experiments

A three-degree-of-freedom piezoelectric actuator with sandwich structure: Design, modeling, and experiment

Feedback linearization and equivalent-disturbance compensation control strategy for piezoelectric stage

Design, modeling, and control of a monolithic compliant x-y- microstage using a double-rocker mechanism

Modeling and Experiments of Bipedal Actuated Linear Piezoelectric Platform with Smooth Motion and Strong Load Capacity