Research on Vibration Suppression for Planar Motors on the Basis of Modal Force Constraint

LI Xin,YANG Kaiming,ZHU Yu,ZHANG Ming

DOI: https://doi.org/10.13334/j.0258-8013.pcsee.2015.12.025

2015-01-01

Abstract:As the demand of the lightweight design, the contradictions between structural quality and flexibility become obvious for planar motors, therefore the vibration caused by the low-order modal will seriously restrict the nanometer positioning precision and the stability of the control system. At present, the control algorithms for vibration suppressing in study are more complicated, thus the effectively applications of them in practical engineering are difficult. In order to solve this problem, a vibration suppression method on the basis of modal force constraint is proposed in this paper. As to the distribution strategy of vertical motor forces, the modal force constraint is introduced, using the special solution obtained, the modal contribution is balance out by each vertical motor, then the vibration suppression problem can be solved from the physical nature aspect. For the first-order modal of the planar, applying the modal force constraint, the identification model shows the rigid body features, and the z-direction positioning error reduces to 5 nm, thus the effectiveness of vibration suppression is verified.