Abstract:Controlling the microstructure homogeneity is crucial in achieving high quality tantalum (Ta) sputtering targets used in integrated circuit fabrication. Unluckily, traditional rolling easily generates a microstructure gradient along the thickness direction in Ta sheets. The deformation and recrystallization behavior of unidirectional and clock rolled Ta with an 87% strain were therefore systematically compared to investigate whether the change of strain-pass can effectively ameliorate the microstructure gradient along the thickness. Electron backscatter diffraction was used to analyze the misorientation characteristics of the deformed grains. A strong microstructure gradient exists in the unidirectional rolled (UR) sheets. Many microshear bands and well-defined microbands occurred in {111} deformed grains in the UR sheets, especially in the center region, while the grain fragmentation with {111} and {100} orientation in the clock rolled (CR) sheets was more homogenous along the thickness. The kernel average misorientation (KAM) and grain reference orientation deviation-hyper (GROD-Hyper) further confirmed these differences. X-ray line profile analysis (XLPA) indicated that the stored energy distribution was more inhomogeneous in the UR sheets. Schmid factor analysis suggested that the strain path changes due to clock rolling promoted the activation of multiple slip systems in {111} oriented grains. Upon static annealing, homogeneous nucleation combined with a slower grain growth rate resulted in finer and more uniform grain size for the CR sheet. In contrast, a strong recrystallization microstructure-gradient along the thickness formed in the UR sheets, which is attributed to the fact that the higher stored energy and more preferential nucleation sites led to faster recrystallization in the center region, as compared with the surface region. Thus, clock rolling can effectively improve the homogeneity of the through-thickness recrystallization microstructure of Ta sheets.

Orientation-dependent grain boundary characteristics in tantalum upon the change of strain path

Inclination-governed Deformation of Dislocation-Type Grain Boundaries

Deformation Mechanism of Metastable Oriented Grains in High-Purity Tantalum under Different Strain Paths

Inhomogeneous deformation of {111} grain in cold rolled tantalum

Quasi-In-Situ EBSD Observation of the Orientation Evolution in Polycrystalline Tantalum During Rolling Deformation

Strain Path Dependence of Microstructure and Annealing Behavior in High Purity Tantalum

Strain Accommodation of <110>-Normal Direction-Oriented Grains in Micro-Shear Bands of High-Purity Tantalum

Effect of strain path change on the through-thickness microstructure during tantalum rolling

Orientation Dependence of the Deformation Microstructure of Ta-4% W after Cold-Rolling

Largely Alleviating the Orientation Dependence by Sequentially Changing Strain Paths

Comparing The Through-Thickness Gradient Of The Deformed And Recrystallized Microstructure In Tantalum With Unidirectional And Clock Rolling

Analysis of Stored Energy Distribution in Three Directions of Tantalum in Deformed and Annealed States

Grain Boundary Orientation Effects on Deformation of Ta Bicrystal Nanopillars under High Strain-Rate Compression

The Evolution of Cold-Rolled Deformation Microstructure of {001}〈110〉 Grains in Ta–7.5wt%W Alloy Foils

The orientation spreading in γ-fiber of electron beam melted Ta-2.5W alloy during cold rolling

The evolution of cold-rolled deformation microstructure of {0 0 1}〈1 1 0〉 grains in Ta-7.5 wt%W alloy foils

Mesoscale Deformation Mechanisms in Relation with Slip and Grain Boundary Sliding in TA15 Titanium Alloy During Tensile Deformation

Effect of grain boundary doping/segregation on the mechanical behavior of Ta bicrystal

Crystallographic analysis of nucleation for random orientations in high-purity tantalum

Quasi-in-situ study on the crystallographic lattice rotation of tantalum during compression deformation

Study on the Grain Rotation of High-Purity Tantalum during Compression Deformation