Abstract:A line encoder composed of a two-probe reading head an arrayed scale grating stitched by multiple separate gratings was proposed, constructed and evaluated in this research for expanding the measurement range. The scale grating is stitched by multiple separate short gratings fabricated by a holographic lithography that is able to provide sub-micron order grating period. Differing from the conventional stitched grating, in which the gap of the adjacent two gratings should be strictly controlled so that a continuous phase can be ensured, the gap in this research is not necessary to be controlled, neither the gap width nor the phases, by using a two-probe reading head. In contrast to the reading head in conventional linear encoder, the two-probe reading head was designed in such a manner that a collimated laser beam with a diameter of 1mm was divided into two parallels probes (probe A/B) by a specially designed prism lens. These two probes are projected perpendicularly onto the transmission type arrayed scale grating. Taking probe A as an example, after passing the grating, the positive and negative first-order diffraction beams follow a typical grating interferometry principle, including propagating direction changing, co-path by a beam splitter and a polarize for a phase delay module and finally interfere with each other, from which the displacement can be obtained. The two probes propagate along similar optical path. The two probes can ensure as least one can be projected onto the grating. By stitching the two probe outputs suitably, the continuous output of the scale grating can be measured accurately. The jig for stitching the separate gratings was investigated and tested. The two-probe reading head prototype was constructed and evaluated.

A Two-Probe Linear Encoder by Using an Arrayed Scale Grating Stitched by Multiple Separate Short Gratings

Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder

Two-probe Optical Encoder for Absolute Positioning of Precision Stages by Using an Improved Scale Grating

A Two-Degree-of-freedom Linear Encoder with a Mosaic Scale Grating

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Design and Testing of a Linear Encoder Capable of Measuring Absolute Distance

Design and Testing of a Four-Probe Optical Sensor Head for Three-Axis Surface Encoder with a Mosaic Scale Grating

Development of Equipment for Simultaneously Measuring Two-dimensional Rotation Angles of the Linear Guide Track

Design and Construction of a Two-Degree-of-freedom Linear Encoder for Nanometric Measurement of Stage Position and Straightness

A multi-probe surface encoder for mosaic XY grating

High Accuracy Calibration Method for Multi-Line Structured Light Three-Dimensional Scanning Measurement System Based on Grating Diffraction.

A Compact Design of Optical Scheme for a Two-Probe Absolute Surface Encoders

Development of a Novel Multi-Line Laser Triangulation Scanning System Based on the Rotary Diffraction Grating

A compact design of optical scheme for multi-axis positioning surface encoders

3D Measurement System Based on Computer-Generated Gratings

Highly accurate, absolute optical encoder using a hybrid-positioning method.

A Simplified Two-Phase Differential Decoding Algorithm for High Precision Grating Encoder

Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

Heterodyne Planar Grating Encoder with High Alignment Tolerance, Especially Insensitivity to Grating Tilts

A Sub-Nanometric Three-Axis Surface Encoder With Short-Period Planar Gratings For Stage Motion Measurement

A Mechanical Mosaic Method for Two-Dimensional Planar Grating Based on Diffracted Beams Orientation