Abstract:A line encoder composed of a two-probe reading head an arrayed scale grating stitched by multiple separate gratings was proposed, constructed and evaluated in this research for expanding the measurement range. The scale grating is stitched by multiple separate short gratings fabricated by a holographic lithography that is able to provide sub-micron order grating period. Differing from the conventional stitched grating, in which the gap of the adjacent two gratings should be strictly controlled so that a continuous phase can be ensured, the gap in this research is not necessary to be controlled, neither the gap width nor the phases, by using a two-probe reading head. In contrast to the reading head in conventional linear encoder, the two-probe reading head was designed in such a manner that a collimated laser beam with a diameter of 1mm was divided into two parallels probes (probe A/B) by a specially designed prism lens. These two probes are projected perpendicularly onto the transmission type arrayed scale grating. Taking probe A as an example, after passing the grating, the positive and negative first-order diffraction beams follow a typical grating interferometry principle, including propagating direction changing, co-path by a beam splitter and a polarize for a phase delay module and finally interfere with each other, from which the displacement can be obtained. The two probes propagate along similar optical path. The two probes can ensure as least one can be projected onto the grating. By stitching the two probe outputs suitably, the continuous output of the scale grating can be measured accurately. The jig for stitching the separate gratings was investigated and tested. The two-probe reading head prototype was constructed and evaluated.

A Two-Degree-of-freedom Linear Encoder with a Mosaic Scale Grating

Design and Construction of a Two-Degree-of-freedom Linear Encoder for Nanometric Measurement of Stage Position and Straightness

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

A Two-Probe Linear Encoder by Using an Arrayed Scale Grating Stitched by Multiple Separate Short Gratings

Two-probe Optical Encoder for Absolute Positioning of Precision Stages by Using an Improved Scale Grating

Design and Testing of a Four-Probe Optical Sensor Head for Three-Axis Surface Encoder with a Mosaic Scale Grating

An Axial Displacement Measurement Relying on the Double-Helix Light Beam

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

A multi-probe surface encoder for mosaic XY grating

Position and Out-Of-Straightness Measurement of A Precision Linear Air-Bearing Stage by Using A Two-Degree-Of-Freedom Linear Encoder

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

An Ultra-Precision Absolute-Type Multi-Degree-of-Freedom Grating Encoder

Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder

A Compact and High-Precision Three-Degree-of-Freedom Grating Encoder Based on a Quadrangular Frustum Pyramid Prism

A Six-Degree-of-freedom Surface Encoder for Precision Positioning of a Planar Motion Stage

Measurement of Six-Degree-Of-Freedom Planar Motions by Using A Multiprobe Surface Encoder

A Sub-Nanometric Three-Axis Surface Encoder With Short-Period Planar Gratings For Stage Motion Measurement

Two-Channel Six Degrees Of Freedom Grating-Encoder For Precision-Positioning Of Sub-Components In Synthetic-Aperture Optics

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Highly accurate, absolute optical encoder using a hybrid-positioning method.