Abstract:Abstract Miniaturized nonvolatile reconfigurable optical components with a subwavelength thickness, extremely compact size, high-speed response, and low power consumption will be the core of next-generation all-optical integrated devices and photonic computing to replace traditional bulky optical devices and integrated circuits, which are reaching physical limitations of Moore’s law. Metasurfaces, as ultrathin planar surfaces, have played a major role in controlling the amplitude, phase, and polarization of electromagnetic waves and can be combined with various active modulation methods to realize a variety of functional devices. However, most existing reconfigurable devices are bounded in volatile nature with constant power to maintain and single functionality, which restricts their further extensive applications. Chalcogenide phase change materials (PCM) have attracted considerable attention due to their unique optical properties in the visible and infrared domains, whereas in the terahertz (THz) regime, research on the reversible phase transition in large-scale areas and applications of Ge 2 Sb 2 Te 5 (GST) are still under exploration. Here, we achieved reversible, repeated, and large-area switching of GST with the help of optical and thermal stimuli. Large-area amorphization with a 1 cm diameter of GST is realized by using a single laser pulse. Then, we incorporate GST into metasurface designs to realize nonvolatile, reconfigurable, multilevel, and broadband terahertz modulators, including the anomalous deflector, metalens, and focusing optical vortex (FOV) generator. Experimental results verify the feasibility of multilevel modulation of THz waves in a broadband frequency range. Moreover, the modulators are reusable and nonvolatile. The proposed approach presents novel avenues of nonvolatile and reconfigurable metasurface designs and can enable wide potential applications in imaging, sensing, and high-speed communications.

Nonvolatile Waveguide Transmission Tuning with Electrically-Driven Ultra-Small GST Phase-Change Material.

Ultracompact Si-GST Hybrid Waveguides for Nonvolatile Light Wave Manipulation

All-optically Modulated Nonvolatile Optical Switching Based on a Graded-Index Multimode Fiber.

Nonvolatile Electrically Reconfigurable Silicon Photonics Enabled by Back-End-of-line Integration of Phase Change Materials

All-optical Non-Volatile Tuning of an AMZI-coupled Ring Resonator with GST Phase-Change Material

Non-volatile Flexible-Grid Wavelength-Selective Switch Using Subwavelength-Grating-ge2sb2te5-assisted Silicon Microring Resonators

All-Optical Non-volatile Tuning of Nanobeam Resonators Using the GST Phase-Change Material

Electrically Controlled 1 × 2 Tunable Switch Using a Phase Change Material Embedded Silicon Microring.

Non-volatile Silicon Photonic Devices Enabled by Phase Change Material

Nonvolatile Multilevel Switching of Silicon Photonic Devices with In2O3/GST Segmented Structures

Nonvolatile Multilevel Switching of Silicon Photonic Devices with In<sub>2</sub>O<sub>3</sub>/GST Segmented Structures

Comparison of the Phase Change Process in a GST-loaded Silicon Waveguide and MMI.

A phase-change thin film-tuned photonic crystal device

Optically Tunable Ultrafast Broadband Terahertz Polarimetric Device Using Nonvolatile Phase‐Change Material

Nonvolatile reconfigurable terahertz wave modulator

Multiphysics simulations of a cylindrical waveguide optical switch using phase change materials on silicon

Dynamic control of anapole states with phase-change alloys.

Wavelength-tunable thermal sources with nonvolatile phase changing material

Wavelength-tunable mid-infrared thermal emitters with a non-volatile phase changing material.

Design of Ultra-Compact Optical Memristive Switches with GST as the Active Material.

A Non-Volatile Optical Filter Based on a Ge2Sb2Te5-assisted Microring with a Tunable Bandwidth and Extinction Ratio