Fabrication and Magnetic Properties of Strip-Patterned FeCoB-SiO2 Nanoparticle Films for GHz Application

Xiulong Ou,Jun He,Zhenjun Xia,Jing An,Jiazheng Hao,Shuli He,Dongliang Zhao

DOI: https://doi.org/10.1016/j.mseb.2019.03.009

IF: 3.407

2019-01-01

Materials Science and Engineering B

Abstract:A series of high stacking density FeCoB-SiO2 nanoparticle films with strip structures were prepared by electric field-assisted deposition technique attached by thermal oxidization processing. We obtained the expected soft magnetic properties for strip-patterned FeCoB-SiO2 nanoparticle films. In this situation, relatively large permeability and high ferromagnetic resonance frequency are easily achieved in a wide gigahertz range. More importantly, the great GHz electromagnetic performance can be maintained in a wide SiO2 volume fraction range by carefully controlling the width of SiO2 strips. These results show that this kind of film materials have great potential for application in integrated devices operated in the gigahertz frequency range. Meanwhile, these single layer soft magnetic film materials with high permeability in the GHz range and high resistivity are easily merged into the micro manufacturing technology, such as CMOS and MEMS technique.