Enhanced High-Frequency Electromagnetic Properties of FeCoB–SiO2/SiO2 Multilayered Granular Films
F. F. Yang,S. S. Yan,M. X. Yu,S. S. Kang,Y. X. Chen,J. S. Sun,Q. T. Xu,H. L. Bai,T. S. Xu,Q. Li,S. B. Pan,G. L. Liu,L. M. Mei
DOI: https://doi.org/10.1016/j.physb.2012.01.082
2012-01-01
Abstract:A series of FeCoB–SiO2/SiO2 multilayered granular films with various thickness were prepared by alternating co-sputtering FeCoB and SiO2 targets and single-sputtering SiO2 target. As-deposited films were annealed in a magnetic field at different temperature. The high-frequency magnetic and electrical transport properties were investigated. The films annealed above 250°C show good soft magnetic properties and obvious uniaxial magnetic anisotropy. The resistivity (ρ), coercivity (Hce) decrease and complex permeability (μ˜), ferromagnetic resonance frequency (fr) increase with increasing annealing temperature and thickness. The desirable high ρ (∼5.92mΩcm), considerable frequency linewidth (Δf∼4.02GHz) and high μ˜ (μ′=120 at low frequency, μmax″=80) were obtained for the 252nm films annealed at 250°C. The amorphous or nanograin phase and strong exchange coupling effect are responsible for the good high-frequency magnetic performance. The electrical transport properties show the films with high ρ and large μ˜ are near the conductive percolation threshold. Moreover, the Δf, damp coefficient (α) and Gilbert damping parameter (G) were discussed based on phenomenological Landau–Lifshitz–Gilbert equation.