Near-Zero Dielectric Loss Millimeter-Wave Leaky-Wave Antenna Using Silicon Mems Process

Yue Li,Peiqin Liu,Zhijun Zhang
2018-01-01
Abstract:In this paper, a novel design strategy is proposed to design low loss leaky-wave antenna array in millimeter wave band. By utilizing modified silicon micromachining process, air-media is introduced in leaky-wave array design, which is significant for reducing dielectric loss in millimeter wave applications. Based on the process, two leaky-wave antenna arrays with near-zero dielectric loss is presented at 60 GHz in this paper. The simulated results validate that the radiation efficiency of the proposed arrays is near 1.0 in center frequency and higher than 0.85 in the operating frequency band. Moreover, considering that the modified silicon micromachining process is a MEMS process, the leaky-wave antennas are quite suitable for system-on-chip (SoC) applications.
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