A Wideband On-Chip Millimeter-Wave Patch Antenna in 0.18 Μm CMOS

Meng Xiangyu,Chi Baoyong,Jia Haikun,Kuang Lixue,Jia Wen,Wang Zhihua

DOI: https://doi.org/10.1088/1674-4926/34/10/105010

2013-01-01

Abstract:A wideband on-chip millimeter-wave patch antenna in 0.18 mu m CMOS with a low-resistivity (10 Omega-cm) silicon substrate is presented. The wideband is achieved by reducing the Q factor and exciting the high-order radiation modes with size optimization. The antenna uses an on-chip top layer metal as the patch and a probe station as the ground plane. The on-chip ground plane is connected to the probe station using the inner connection structure of the probe station for better performance. The simulated S-11 is less than -10 dB over 46-95 GHz, which is well matched with the measured results over the available 40-67 GHz frequency range from our measurement equipment. A maximum gain of -5.55 dBi with 4% radiation efficiency at a 60 GHz point is also achieved based on Ansoft HFSS simulation. Compared with the current state-of-the-art devices, the presented antenna achieves a wider bandwidth and could be used in wideband millimeter-wave communication and image applications.