Abstract:We present a rapid prototyping and a cost effective fabrication process on batch fabricated wafer-level micro inductive components with polymer magnetic composite (PMC) cores. The new PMC cores provide a possibility to bridge the gap between the non-magnetic and magnetic core inductive devices in terms of both the operating frequency and electrical performance. An optimized fabrication process of molding, casting, and demolding which uses teflon for the molding tool is presented. High permeability NiFeZn powder was mixed with Araldite epoxy to form high resistive PMC cores. Cylindrical PMC cores having a footprint of 0.79 mm 2 were fabricated with varying percentage of the magnetic powder on FR4 substrates. The core influence on the electrical performance of the inductive elements is discussed. Inductor chips having a solenoidal coil as well as transformer chips with primary and secondary coils wound around each other have been fabricated and evaluated. A core with 65% powder equipped with a solenoid made out of 25 µm thick insulated Au wire having 30 turns, yielded a constant inductance value of 2 µH up to the frequency of 50 MHz and a peak quality factor of 13. A 1:1 transformer with similar PMC core and solenoidal coils having 10 turns yielded a maximum efficiency of 84% and a coupling factor of 96%. In order to protect the solenoids and to increase the mechanical robustness and handling of the chips, a novel process was developed to encapsulate the components with an epoxy based magnetic composite. The effect on the electrical performance through the magnetic composite encapsulation is reported as well.

3D Microtransformers with Air Core Inside Fused Silica

3D Integrated Coreless Microtransformer Processed by Femtosecond Laser Micro/nano Fabrication

Micro-transformer on MEMS Silicon-based

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Facile Fabrication of True Three-Dimensional Microcoils Inside Fused Silica by A Femtosecond Laser

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication Of 3d Solenoid Microcoils In Silica Glass By Femtosecond Laser Wet Etch And Microsolidics

Design and Manufacture of Millimeter-Scale 3D Transformers for RF-IC

Microtransformer on silicon with CoFeB magnetic core for high-frequency signal applications

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Process for the fabrication of complex three-dimensional microcoils in fused silica.

Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

Three-dimensional Metallic Microcomponents Achieved in Fused Silica by a Femtosecond-Laser-based Microsolidifying Process

Design and Preparation High Efficiency Thin-Film Transformer at 200Mhz

High-level Integration of Three-Dimensional Microcoils Array in Fused Silica

Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics

Polymer Magnetic Composite Core Based Microcoils and Microtransformers for Very High Frequency Power Applications

Fabrication of Three-Dimensional Metallic Microcomponents in Fused Silica by a Femtosecond Laser & Micromoulding (FLM) Method

Fusion Spliced Microfiber Closed-Loop Resonators