Abstract:Fiber-integrated micro/nanostructures play a crucial role in modern industry, mainly owing to their compact size, high sensitivity, and resistance to electromagnetic interference. However, the three-dimensional manufacturing of fiber-tip functional structures beyond organic polymers remains challenging. It is essential to construct fiber-integrated inorganic silica with designed functional nanostructures for microsystem applications. Here, we develop a strategy for the 3D nanolithography of fiber-integrated silica from hybrid organic-inorganic materials by ultrafast laser-induced multiphoton absorption. Without silica nanoparticles and polymer additives, the acrylate-functionalized precursors can be locally cross-linked through a nonlinear effect. Followed by annealing at low temperature, the as-printed micro/nanostructures are transformed to high-quality silica with sub-100 nm resolution. Silica microcantilever probes and microtoroid resonators are directly integrated onto the optical fiber, showing strong thermal stability and quality factors. This work provides a promising strategy for fabricating desired fiber-tip silica micro/nanostructures, which is helpful for the development of integrated functional device applications.

High-level Integration of Three-Dimensional Microcoils Array in Fused Silica

Facile Fabrication of True Three-Dimensional Microcoils Inside Fused Silica by A Femtosecond Laser

Process for the fabrication of complex three-dimensional microcoils in fused silica.

Fabrication Of 3d Solenoid Microcoils In Silica Glass By Femtosecond Laser Wet Etch And Microsolidics

Fabrication of Three-Dimensional Metallic Microcomponents in Fused Silica by a Femtosecond Laser & Micromoulding (FLM) Method

Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

Three-dimensional Metallic Microcomponents Achieved in Fused Silica by a Femtosecond-Laser-based Microsolidifying Process

3D Multi-Microchannel Helical Mixer Fabricated by Femtosecond Laser inside Fused Silica

A High-Efficiency Three-Dimensional Helical Micromixer in Fused Silica

A High Integration 3D Temperature Controllable Micro-Reactor Fabricated by Femtosecond Laser Wet Etching

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics

Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Fabrication of Three-Dimensional Microvalves of Internal Nested Structures Inside Fused Silica

Hybrid Laser Microfabrication of Three-Dimensional Large-Scale Fused Silica Microfluidic Chips

Ultrafast Laser 3D Nanolithography of Fiber-Integrated Silica Microdevices

Three Dimensional Multilayer Solenoid Microcoils Inside Silica Glass

Fabrication of High Fill Factor Cylindrical Microlens Array with Isolated Thermal Reflow

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Fabrication of Three-Dimensional Helical Microchannels with Arbitrary Length and Uniform Diameter Inside Fused Silica

Miniaturized 3-D Solenoid-Type Micro-Heaters in Coordination with 3-D Microfluidics