Rotation Error Suppression for a Doubly Decoupled MEMS Gyroscope

Hengzhi Hu,Xudong Zheng,Yiyu Lin

DOI: https://doi.org/10.1109/3M-NANO.2018.8552175

2018-01-01

Abstract:The following topics are dealt with: finite element analysis; nanofabrication; scanning electron microscopy; nanostructured materials; surface roughness; design engineering; nickel alloys; shape memory effects; bending; nanoparticles.

What problem does this paper attempt to address?

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

Zhipeng Ma,Xiaoli Chen,Xiaojun Jin,Yiming Jin,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.3390/mi12121483

IF: 3.4

2021-01-01

Micromachines

Abstract:This study investigated the effects of structural dimension variation arising from fabrication imperfections or active structural design on the vibration characteristics of a (100) single crystal silicon (SCS) ring-based Coriolis vibratory gyroscope. A mathematical model considering the geometrical irregularities and the anisotropy of Young's modulus was developed via Lagrange's equations for simulating the dynamical behavior of an imperfect ring-based gyroscope. The dynamical analyses are focused on the effects on the frequency split between two vibration modes of interest as well as the rotation of the principal axis of the 2 theta mode pair, leading to modal coupling and the degradation of gyroscopic sensitivity. While both anisotropic Young's modulus and nonideal deep trench verticality affect the frequency difference between two vibration modes, they have little contribution to deflecting the principal axis of the 2 theta mode pair. However, the 4 theta variations in the width of both the ring and the supporting beams cause modal coupling to occur and the degenerate 2 theta mode pair to split in frequency. To aid the optimal design of MEMS ring-based gyroscopic sensors that has relatively high robustness to fabrication tolerance, a geometrical compensation based on the developed model is demonstrated to identify the geometries of the ring and the suspension.
A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

Haibin Wu,Xudong Zheng,Xuetong Wang,Yaojie Shen,Zhipeng Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/jsen.2021.3110054

IF: 4.3

2021-01-01

IEEE Sensors Journal

Abstract:We propose a MEMS gyroscope system working with a fixed resonance frequency which combines resonant constant-frequency (RCF) driving and real-time automatic mode-matching technique with the help of linear tuning triangular capacitors. The special tuning capacitors are implemented in both the gyroscope drive mode and sense mode as drive-mode frequency-tuning (DFT) and sense-mode frequency-tuning (SFT), respectively. RCF assures that the drive-mode equivalent resonance frequency after tuned can keep with the given constant excitation frequency, while real-time automatic mode-matching further eliminates mismatches between the drive-mode and sense-mode equivalent resonance frequencies. As a result, the gyroscope system achieves constancy and equality of the excitation frequency and two modal resonance frequencies. Performance evaluations show that the gyroscope with the sense mode quality factor of 26.7k reaches bias instability of 0.09 degrees/h and angle random walk of 0.0087 degrees/root h under room temperature without any compensation, and is capable of detecting an angular rate as low as 0.001 degrees/s.
A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Haibin Wu,Xudong Zheng,Yaojie Shen,Xuetong Wang,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1109/sensors47087.2021.9639632

2021-01-01

Abstract:The work illustrates a resonant constant-frequency (RCF) driving technique used in a MEMS gyroscope which has linear frequency-tuning triangular capacitors. Differing from that conventional driving technique where the gyroscope excitation frequency is time-varying, the RCF strategy assures that the excitation frequency and resonant frequency are equal and constant in the gyroscope drive mode by means of frequency-tuning feedback. As a result, RCF can eliminate effects of excitation-frequency instability and drift on gyroscope output performance. Combining RCF with real-time automatic mode-matching, the tested gyroscope with sense-mode quality factor of 26.75k has achieved bias instability of 0.09 °/h and angle random walk of 0.0087°/√h.
Design and Test of MEMS Gyroscope Control System Based on LMSD

Shuai Guo,Xudong Zheng,Yiyu Lin,Wei Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/3m-nano.2017.8286267

2017-01-01

Abstract:In order to improve the performance of MEMS gyroscopes, the least mean square demodulation (LMSD) algorithm is utilized in MEMS gyroscope control system. By using Matlab tool, the simulation result shows that the LMSD algorithm has better noise suppression performance than multiplicative demodulation (MD). LMSD algorithm is carried out in field-programmed-gate-array (FPGA) and experimental results are in good agreement with the simulation. Combining with automatic gain control (AGC) and phase-locked loop (PLL) technology, the amplitude variance and phase variance of drive mode are respectively 62ppm and 0.001°. The nonlinearity of scale factor based on LMSD algorithm is 0.068%. Moreover, the gyroscope using LMSD exhibits a bias stability (BS) of 1.8°/h and an angle random walk (ARW) of 0.031°/Vh, better than the BS 6.7°/h and ARW 0.114°/Vh using MD. The experiment proves the feasibility and effectiveness of LMSD algorithm in the digital control system of MEMS gyroscope.
Performance Improvement for MEMS Gyroscopes by Suppressing the Circuit Phase Delay

Haibin Wu,Xudong Zheng,Xuetong Wang,Qiongxia Pang,Yaojie Shen,Zhipeng Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/mems51782.2021.9375419

2021-01-01

Abstract:This paper analyzes the impact of the interface circuit phase delay both in gyroscope drive mode and sense mode. An automatic signal processing algorithm for eliminating the impact of circuit phase delay is proposed, which combines the modified double sideband demodulation in the drive mode, quadrature nulling, force rebalanced control in the sense mode together. The impact of circuit phase delay on gyroscope performance is validated by experiments. With the impact of interface circuit phase delay suppressed, bias instability and angle random walk of the fully-symmetrical slot-structure gyroscope are 0.229°/h and 0.011°/√h, respectively, improved by 3.48 times and 10 times compared to the condition without phase suppression. After 1s average, the instability of 0.0004 °/s in the standard deviation is achieved.
Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Xudong Zheng,Xuetong Wang,Yaojie Shen,Chenhao Xia,Wenyuan Tong,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1088/1361-6439/acbfc6

2023-01-01

Journal of Micromechanics and Microengineering

Abstract:We report for the first time an implementable method to identify and suppress the driving force misalignment angle for a MEMS gyroscope working either in amplitude modulated (AM) or Lissajous frequency modulated (LFM) mode using parametric excitation. By introducing driving force misalignment angle into gyroscope dynamic equations, we illustrate that gyroscope angular rate output is affected by driving force misalignment angle and cross-axis damping jointly. We propose parametric excitation as a way to both identify and calculate the driving force misalignment angle. The identification results for a gyroscope working in both AM and LFM mode are similar, which indicates the effectiveness of the proposed identification method. Instead of using traditional amplitude control loop by adjusting the driving force, we do the automatic gain control by adjusting the parametric pump voltage so that a fixed drive voltage can be used, which also indicates fixed force coupling. Experimental results show that after suppression, the bias instability (BI) of AM mode is improved from 4.7 degrees h(-1) to 2.3 degrees h(-1) and the BI of LFM mode is improved from 1.4 degrees h(-1) to 0.9 degrees h(-1) which is the lowest result reported for LFM gyroscope.
High Performance Interface Circuit for MEMS Gyroscope

WANG Hui-quan,YU Fa-xin,JIN Zhong-he,ZHENG Xu-dong,CHEN Yong,JIAO Ji-wei,WANG Yue-lin

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.04.053

2006-01-01

Abstract:Interface circuit for a MEMS gyroscope is optimized, which includes a close-loop driven circuit and a detected circuit. Output of the gyro is very low that the interface circuit followed it is very important. By carefully designing the interface circuit followed the gyro, the automatic gain control circuit in the close-loop driven circuit and the detected circuit, performance of the system is improved, the gyro’s resolution reaches 180°/h, with scale factor 9.8 mV/~ (o) ·s~ -1 , nonlinearity 0.43%.
Feedback Control Strategy Suppressing Structural Error in MEMS Gyroscope

YANG Jun,GAO Zhong-yu,ZHANG Rong,CHEN Zhi-yong

DOI: https://doi.org/10.3969/j.issn.1005-6734.2007.04.026

2007-01-01

Abstract:This paper is mainly concerned with the structural imperfections due to restrictive tolerance in micro- fabrication, and the instrumental error resulted from environment-dependent structure parameters. A digital control architecture used to suppress the structural error of gyroscope was presented, including the feedback de-coupling control of structure, the constant-frequency and constant-amplitude control of drive mode, and the force-rebalance de-coupling control of sense model. Modeling and simulation on the above control loops were presented based on average and perturbation theory. The simulation results show that the control architecture can effectively reduce the cross-coupling errors and dependence of gyro output on structure parameters.
Development Of A Cmos-Mems Gyroscope Using Pure-Oxide And Symmetric Metal-Oxide Stacking Structures

Cheng-Yu. Ho,Feng-Yu Lee,Weileun Fang

DOI: https://doi.org/10.1109/TRANSDUCERS.2017.7994251

2017-01-01

Abstract:This study exploits the concepts of pure-oxide and symmetric metal-oxide films to design and implement a CMOS-MEMS gyroscope. Features of this approach include: (1) the main structure of gyroscope is formed by the CMOS pure-oxide layers, (2) the drive and sense electrodes are formed by the symmetric metal-oxide stacking layers. Thus, the unwanted after-process deformation due to the thin film residual stresses and the unwanted in-use thermal deformation due to the CTE mismatch of metal-dielectric films are significantly reduced. Preliminary result shows a flat structure (radius of curvature, ROC >= 80mm) with 500 mu mx470 mu m footprint is achieved. Moreover, the angular rate sensitivity is 4 mu V/degrees/s when measured at atmosphere, and can be further improved using vacuum sealing.
Design And Simulation Of A Completely Decoupled Micromechanical Gyroscope

Guo Huifang,Li Jinming,Liu Jun,Zhang Wendong,Ma Youchun,Zhou Zhaoying

2007-01-01

Abstract:In order to solve any asymmetry in t(1)he device vibration patterns due to fabrication, a novel completely decoupled MEMS capacitive Gyroscope is presented This structure completely solves the coupling between the drive and sense mode from the structure itself At the same time, the structure allows approximately matched resonant frequencies for the drive and sense vibration modes for improved sensitivity. The structure is fabricated by standardized bulk silicon process technology for realizing batch production. This paper describes the design characteristic and simulation result of the structure.
MEMS IMU Error Mitigation Using Rotation Modulation Technique

Shuang Du,Wei Sun,Yang Gao

DOI: https://doi.org/10.3390/s16122017

IF: 3.9

2016-11-29

Sensors

Abstract:Micro-electro-mechanical-systems (MEMS) inertial measurement unit (IMU) outputs are corrupted by significant sensor errors. The navigation errors of a MEMS-based inertial navigation system will therefore accumulate very quickly over time. This requires aiding from other sensors such as Global Navigation Satellite Systems (GNSS). However, it will still remain a significant challenge in the presence of GNSS outages, which are typically in urban canopies. This paper proposed a rotary inertial navigation system (INS) to mitigate navigation errors caused by MEMS inertial sensor errors when external aiding information is not available. A rotary INS is an inertial navigator in which the IMU is installed on a rotation platform. Application of proper rotation schemes can effectively cancel and reduce sensor errors. A rotary INS has the potential to significantly increase the time period that INS can bridge GNSS outages and make MEMS IMU possible to maintain longer autonomous navigation performance when there is no external aiding. In this research, several IMU rotation schemes (rotation about X-, Y- and Z-axes) are analyzed to mitigate the navigation errors caused by MEMS IMU sensor errors. As the IMU rotation induces additional sensor errors, a calibration process is proposed to remove the induced errors. Tests are further conducted with two MEMS IMUs installed on a tri-axial rotation table to verify the error mitigation by IMU rotations.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope

Shang-chun FAN,Lu-da WANG,Zhan-she GUO

DOI: https://doi.org/10.3873/j.issn.1000-1328.2010.10.017

2010-01-01

Abstract:This paper introduces a novel micro-electromechanical systems (MEMS) vibratory rate gyroscope based on resonant sensing of the Coriolis force. Its advantages include a quasi-digital FM (frequency modulation) output, high sensitivity, and flexible parameter design. As a whole, this structure is consisted of proof masses, frame suspensions, two-stage amplifying leverage mechanisms, double-ended tuning fork (DETF), driving and checking combs. The simulation results show that, while other performances do not change a lot, the sensitivity of the initial structure, the improved structure 1, the improved structure 2 and the final structure are 0.080, 0.210, 0.341 and 0.5447 Hz/(°/s)respectively. The sensitivity increased a lot after each improvement. Moreover, for the final structure, the amplitude of DETF is 1.16×10-4 times as big as that of the external mass in the driven direction. And the maximum relative deviation is 6.41×10-7 on the measurement range (±300°/s).
A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

chunhua he,qinwen huang,yunfei en,qiancheng zhao,zhenchuan yang,guizhen yan

DOI: https://doi.org/10.1109/EDSSC.2014.7061183

2014-01-01

Abstract:This paper presents a novel optimization design method for the closed loop control of the sense mode of a MEMS gyroscope, which aims at improving the performances and reliability of the control system.
Shape Optimization of Eigenfrequencies in MEMS Gyroscopes

Daniel Schiwietz,Marian Hörsting,Eva Maria Weig,Peter Degenfeld-Schonburg,Matthias Wenzel

DOI: https://doi.org/10.48550/arXiv.2402.05837

2024-02-09

Abstract:Microelectromechanical systems (MEMS) gyroscopes are widely used in consumer and automotive applications. They have to fulfill a vast number of product requirements which lead to complex mechanical designs of the resonating structure. Arriving at a final design is a cumbersome process that relies heavily on human experience in conjunction with design optimization methods. In this work, we apply node-based shape optimization to the design of a MEMS gyroscope. For that purpose, we parametrize the coordinates of the nodes of the finite element method (FEM) mesh that discretize the shapes of the springs. We then implement the gradients of the mechanical eigenfrequencies and typical MEMS manufacturability constraints, with respect to the design parameters, in a FEM code. Using gradient-based optimization we tune the gyroscope's frequency split and shift spurious modes away from the first three multiples of the gyroscope's drive frequency while manufacturability constraints are fulfilled. The resulting optimized design exhibits novel geometrical shapes which defy any human intuition. Overall, we demonstrate that shape optimization can not only solve optimization problems in MEMS design without required human intervention, but also explores geometry solutions which can otherwise not be addressed. In this way, node-based shape optimization opens up a much larger space of possible design solutions, which is crucial for facing the ever increasing product requirements. Our approach is generic and applicable to many other types of MEMS resonators.

Computational Engineering, Finance, and Science
Design and Simulation of Novel MEMS Resonant Gyroscope

樊尚春,王路达,郭占社

2009-01-01

Abstract:A novel silicon microelectromechanical(MEMS) resonant gyroscope was presented.Its advantages include a quasi-digital FM(frequency modulation) output,high sensitivity,high linearity,self-decoupled,etc.The structure includes proof masses,cantilevers,two-stage amplifying leverage mechanisms,double-ended tuning fork(DETF),driving and sensing combs.Two-stage amplifying leverage mechanisms,outboard masses,frame construction etc are used to improve the performance of the structure.The simulation results show that the sensitivity of the gyroscope is 0.309 Hz/(deg·s-1),and the maximum relative deviation is 9.4×10-8 on the measurement range(±300deg/s).In the driven direction,the amplitude of DETF is 2.96×10-6 times as big as its of the external mass.This shows that it has excellent decoupling capability.
A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope with Off-Plane Coupling Suppression Silicon Gratings

Jian Cui,Qiancheng Zhao

DOI: https://doi.org/10.1109/tie.2021.3127036

IF: 7.7

2022-01-01

IEEE Transactions on Industrial Electronics

Abstract:This articledemonstrates the developments toward a high-performance monolithic wheeled structure horizontal dual-axis [pitch (X-axis) and roll (Y-axis)] microelectromechanical system (MEMS) gyroscope based on off-plane coupling suppression silicon gratings. Gyroscopes have been fabricated with a silicon-on-glass fabrication process with vacuum sealed in metal packaging. The featured gyroscope operates in split mode with the bandwidths of two axes devices both of ∼70 Hz. By unitizing two individual active restraining control loops that adjust the quadrature amplitude via differentially biasing the silicon gratings in real time, the off-plane mechanical couplings of the two sense modes are significantly reduced by ∼95 and ∼30 times, which enables ∼25-fold and ∼56-fold improvements in the bias instability (BI) for a typical dual-axis device. Tactical-grade performances are achieved for both the X-axis and Y-axis gyroscopes with angle random walk of 0.02 deg/√h and 0.045 deg/√h along with in-run BI of 0.26 deg/h and 0.65 deg/h, respectively, without any temperature compensation. The current preliminary results show great potential to achieve navigation grade precision by employing the mode-matching technique in the future. The use of silicon gratings for out-of-plane coupling reduction also provides an effective way to build a high-performance planar monolithic chip inertial measurement unit.
Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Boqian Sun,Shunyue Wang,Haixia Li,Xiaoxia He

DOI: https://doi.org/10.3390/s16101747

IF: 3.9

2016-01-01

Sensors

Abstract:A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by a torque-rebalance loop. In this paper, a decoupling compensation method is proposed and investigated experimentally based on an electrostatically suspended micromachined gyroscope. In order to eliminate the negative spring effect inherent in the gyroscope dynamics, a stiffness compensation scheme was utilized in design of the decoupled rebalance loop to ensure loop stability and increase suspension stiffness. The experimental results show an overall stiffness increase of 30.3% after compensation. A decoupling method comprised of inner- and outer-loop decoupling compensators is proposed to minimize the cross-axis coupling error. The inner-loop decoupling compensator aims to attenuate the angular position coupling. The experimental frequency response shows a position coupling attenuation by 14.36 dB at 1 Hz. Moreover, the cross-axis coupling between the two angular rate output signals can be attenuated theoretically from −56.2 dB down to −102 dB by further appending the outer-loop decoupling compensator. The proposed dual-loop decoupling compensation algorithm could be applied to other dual-axis spinning-rotor gyroscopes with various suspension solutions.
A Novel Experimental Method for Determining the Eigen-Axes Angle of MEMS Ring Gyroscope

Jin Wang,Zhiyong Chen,Rong Zhang,Bowen Xing

DOI: https://doi.org/10.1088/1742-6596/1303/1/012001

2019-01-01

Journal of Physics Conference Series

Abstract:MEMS ring gyroscope with sensitive structural errors has frequency splitting in the working modes and the eigen-axes are no longer located at any arbitrary position. Among the imperfection, the fourth harmonic distribution components of the mass and Young's modulus have the most significant influence on the frequency split. In order to determine the position angle of the defects, the frequency response characteristics at the sense electrodes of the ring structure were analysed, and a calculate method to ascertain the eigen-axis position was found by using the frequency response parameters. To verify the validity of this method, a finite element model was established, and the harmonic response was analysed. The simulation results show that the relative error is about 8%. This method was applied in a multi-ring eigen-axes experiment, the harmonic response under different drive and sense electrodes combinations were tested. The average of the calculated angle is 43.3050°, and the standard deviation is 0.8940° which shows the consistency of the calculated values. This method provides a support for the modification of ring structure errors.
Design and Analysis of Mode-Matched Decoupled Mass MEMS Gyroscope with Improved Thermal Stability

Uzair Bashir,Shafaat Ahmed Bazaz,Muhammad Mubasher Saleem,Rana Iqtidar Shakoor,Muhammad Owais Tariq,Pirbhat Kumar

DOI: https://doi.org/10.1088/1361-6501/ad4bfd

IF: 2.398

2024-05-17

Measurement Science and Technology

Abstract:This paper presents an efficient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize the gyroscope's performance. The device features a size of 1.8 ×2.772 mm^2. A decoupled mass MEMS gyroscope has been designed using a novel mechanical beam configuration that optimizes the structural design to reduce unwanted interactions between drive and sense axes motions. Mode order has been achieved by obtaining the first two modes as drive and sense modes at 9946.3 Hz and 10202.7 Hz, respectively. Parallel plate electrostatic tuning electrodes have been added to adjust and match the drive and sense modes at the resonant frequencies of 9946 Hz. This mode matching is crucial for optimizing gyroscope performance, accuracy, and sensitivity. The effects of temperature variation on the performance of the designed decoupled mass MEMS gyroscope have been investigated, particularly in terms of its mode-matched operation achieved using tuning electrodes. Finite Element Method (FEM) simulations were conducted, demonstrating that thermal stability was achieved, and mode-matched operation was maintained within the temperature range of -40 oC to 80 oC. The gyroscope exhibits enhanced performance compared to existing MEMS gyroscopes under mode-matched conditions, featuring a lower temperature coefficient of frequency (TCF) at 0.0415 Hz/oC in the drive mode and 0.0165 Hz/oC in the sense mode. FEM analysis for the fabrication process tolerances has been done, where MEMS gyroscope's resonant frequencies, output capacitance, output displacement, and sense mode quality factor have shown negligible changes to fabrication process tolerances. Transient analysis was conducted using CoventorWare MEMS+ 3D schematic, which was integrated with MATLAB Simulink to measure the MEMS gyroscope's output response, which corresponded with the varying input angular velocity signal.

engineering, multidisciplinary,instruments & instrumentation
An In-Run Automatic Mode-Matching Method With Amplitude Correction and Phase Compensation for MEMS Disk Resonator Gyroscope

Yi Zhou,Yixuan Li,Yan Su,Tong Zhou,Jingbo Ren

DOI: https://doi.org/10.1109/TIM.2023.3305710

IF: 5.6

IEEE Transactions on Instrumentation and Measurement

Abstract:To resolve the problem of frequency split arising from nonuniform circumferential stiffness distribution in the fully symmetrical resonator structure of micro-electromechanical system (MEMS) vibration gyroscopes due to processing errors. In this research, an in-run automatic mode-matching method with amplitude correction and phase compensation is proposed for an MEMS disk resonator gyroscope (DRG). A double-sideband signal negative feedback system is constructed with a double-sideband signal as the input and the sense mode output signal as the output. By comparing the response amplitude difference between the lower sideband signal and the upper sideband signal using the negative feedback system, the identification and measurement of the frequency split between gyroscope modes are realized. In addition, the deterioration of tuning accuracy due to the amplitude asymmetry and circuit phase errors is studied theoretically and by simulation. A response amplitude demodulation method with amplitude correction and phase compensation is proposed to further improve the tuning accuracy. The results of experiments show that the bias instability (BI) and the angle random walk (ARW) of the MEMS DRG are 0.5662°/h and 0.03935°/ $\surd \text{h}$ , respectively, when adopting the mode-matching method with compensation. Compared with the mode-matching method without compensation, the BI and the ARW of the MEMS DRG are increased by 3.07 and 1.62 times, respectively. The tuning accuracy is controlled within −0.06 Hz in the mode-matching state.

Engineering,Computer Science

Rotation Error Suppression for a Doubly Decoupled MEMS Gyroscope

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Design and Test of MEMS Gyroscope Control System Based on LMSD

Performance Improvement for MEMS Gyroscopes by Suppressing the Circuit Phase Delay

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

High Performance Interface Circuit for MEMS Gyroscope

Feedback Control Strategy Suppressing Structural Error in MEMS Gyroscope

Development Of A Cmos-Mems Gyroscope Using Pure-Oxide And Symmetric Metal-Oxide Stacking Structures

Design And Simulation Of A Completely Decoupled Micromechanical Gyroscope

MEMS IMU Error Mitigation Using Rotation Modulation Technique

Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope

A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

Shape Optimization of Eigenfrequencies in MEMS Gyroscopes

Design and Simulation of Novel MEMS Resonant Gyroscope

A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope with Off-Plane Coupling Suppression Silicon Gratings

Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

A Novel Experimental Method for Determining the Eigen-Axes Angle of MEMS Ring Gyroscope

Design and Analysis of Mode-Matched Decoupled Mass MEMS Gyroscope with Improved Thermal Stability

An In-Run Automatic Mode-Matching Method With Amplitude Correction and Phase Compensation for MEMS Disk Resonator Gyroscope