The application of moiré inversion technique in the characterization of micro-scale 3D periodic structures

Dan Wu,Huimin Xie,Dejin Huang,Kun Qin

DOI: https://doi.org/10.1016/j.optlaseng.2018.03.001

IF: 5.666

2018-01-01

Optics and Lasers in Engineering

Abstract:•A characterization method of micro-scale 3D periodic structures is proposed in this paper.•The stereo vision technique and digital phase shifting method was applied in this revision method.•The shape and periodic structures of the specimen can be characterized by the stereo vision technique and phase shifting method. The proposed method is easy to implement under various microscopes to characterize the micro-scale 3D periodic structures.•A simulation test was performed and experimental validation was also conducted. The results indicate the proposed method is feasible and reliable in the characterization of micro-scale periodic structures.