Experimental Demonstration of −730V Vertical SiC P-Mosfet with High Short Circuit Withstand Capability for Complementary Inverter Applications

Junjie An,Masaki Namai,Mikiko Tanabe,Dai Okamoto,Hiroshi Yano,Noriyuki Iwamuro
DOI: https://doi.org/10.1109/iedm.2016.7838391
2016-01-01
Abstract:A new p-channel vertical 4H-SiC MOSFET has been successfully fabricated for the first time. Its breakdown voltage is over-730 V and the short circuit capability is 15% higher than that of 4H-SiC n-channel MOSFET. This could be a superior power device applicable for high frequency complementary inverter.
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