Abstract:Microelectromechanical systems (MEMS) integrate miniaturized mechanical structures with electronics to extend the benefits of planar integrated circuit technology to a broader class of systems, involving sensors, actuators, filters, resonators, switches, and wave guides. The mechanical structures, such as beams, plates, groves, and diaphragms, implement transduction between energy domains, passive implementations of discrete electrical devices, and conduction paths for electromagnetic radiation [F. Frank, J. Staller, The merging of micromachining and microelectronics, Third International Forum on ASIC and Transducer Technology, Alberta, Canada, May 1990, pp. 53–60, R. Howe, Silicon micromechanics: sensors and actuators in a chip, IEEE Spectrum, July (1990) 29–35].To realize the potential and growth of microelectromechanical systems (MEMS) technology, many new design and manufacturing challenges must be addressed. The close proximity of the integration of mechanical and electrical domains within the small dimensions associated with very large scale integration (VLSI) presents new energy-coupling issues. The behavior of the overall system is not the simple concatenation of separate mechanical and electrical behaviors, but the simultaneous combination of the mechanical and electrical behaviors. New modeling, analysis, and design techniques are required to address both mechanics and electronics. In this paper, we address initial design capture and system conceptualization of MEMS transducers based on visual modeling and design.Visual modeling frames the task of generating hardware description language (analog and digital) component models in a manner similar to the task of generating software programming language applications. A domain is created using relevant artifacts and the artifacts are rendered to highlight key design aspects. The artifacts may be directly manipulated in controlled ways to alter design aspects—a process we refer to as design-by-direct-manipulation.To facilitate the application of visual modeling and design for microelectromechanical transducers, artifacts, renderings, and associated design aspects need to be largely predefined. This requirement leads to a structured topological design strategy wherein microelectromechanical foundry cell libraries are utilized. Microelectromechanical system transducer design becomes a process of exploring candidate cells (topologies), varying key aspects of the transduction for each topology, and determining which topology best satisfies design requirements.Design renderings and aspects emphasize a circuit level of abstraction. Coupled-energy MEMS characterizations are presented based on branch constitutive relations and an overall system of simultaneous differential and algebraic equations (DAE). The resulting design methodology is called Visual Integrated-Microelectromechanical VHDL-AMS Interactive Design (VIVID).

VHDL-AMS Macro-Models of MEMS Devices

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

Design Method of Non-standard Structure for MEMS Based on Multi-granularity Macro-modeling

Macromodel extraction for MEMS devices based on model order reduction

Flexible Design Modeling Methodology for MEMS Based on Petri Net

Macro modeling method for electrostatic-drive silicon diaphragm

COMPUTER-AIDED DESIGN AND SIMULATION FOR MEMS DEVICES

A New Modeling Method of MEMS System's Noise

MEMS nodal modeling and its application to design of integrated microsystems

A Novel Hybrid Macromodel for MEMS System-Level Modeling and Simulation

A Hybrid System-Level Modeling and Simulation Methodology for Structurally Complex Microelectromechanical Systems

Hybrid Macromodels for Modeling and Simulation of a Z-Axis Micro Accelerometer

Mixed-signal system modeling methodology with VHDL-AMS

Multi-Body Systems' Modeling and Simulation Method for Mechatronics Design Based on VHDL-AMS

A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description

Review of Research on Macromodel for MEMS System-level Simulation

On The Modeling Methodology of MEMS System-Level Simulation

An efficient macro model for CMOS-MEMS thermal wind speed sensor

A System Level Modeling Method of MEMS Using Multi-Port-Component Network

Circuit Modeling and Simulation Based on VHDL-AMS

Visual modeling and design of microelectromechanical system transducers