Photoluminescence Around 1.54μm Wavelength from Erbium-doped Silicon Dependence on Annealing Temperature

徐飞,肖志松,程国安,易仲珍,曾宇昕,张通和,顾岚岚
DOI: https://doi.org/10.3321/j.issn:0253-3219.2002.08.013
2002-01-01
Abstract:Er ions were implanted into Si substrates using metal vapor vacuum arc (MEVVA) ion source implanter, and Er-doped Si thin films have been formed after rapid thermal annealing (RTA). It was analyzed by Rutherford back-scattering spectroscopy (RBS) that Er concentrations in the thin films were close to 10at% corresponding to the level of ~10 21 atoms/cm 3 and Er segregation in the surface layer of the thin films appeared with increasing the temperature of RTA. The recovery of irradiation damage, Er segregation and Si solid phase epitaxy of Si amorphous layers were closely dependent on annealing temperature, which would influence on photoluminescence around 1.54μm from Er-doped Si thin film.
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