Grating Fourier Analysis and Computer Moiré Technique

FENG Chuan-yu,HAN Yun,MA Li,HE Shi-ping

DOI: https://doi.org/10.3969/j.issn.0253-2778.2001.02.008

2001-01-01

JUSTC

Abstract:To measure the small deformations of small specimens and large deformations of large speci mens grating analytical method was applied. Grating analysis computational simulation and experimen tal calibrations are processed. In addition, the measurement precision is analyzed.

What problem does this paper attempt to address?

S5-5 research on the moiré fringes formed by circular grating and linear grating

Xiaoyu Chen,Jinbo Su,Xiangqun Cao,Bin Lin,Bo Yuan

2010-01-01

Abstract:The features of moiré fringe, which is generated by overlapping a circular grating and a linear grating, were studied by ordinal number equation in this paper. Given that the pitch of circular grating is a and that of linear grating is p, the figures of moiré fringe formed by them are hyperbola, parabola and ellipse when a>p, a=p and a<p, respectively. As the pitches of these two gratings are close to each other, magnification of moiré fringe is over 100, which is useful for the measurement of a small displacement. However, the shape of moiré fringe will no longer be distinguishable at the same time. Besides, the larger the fill factor is, the lower the visibility of moiré fringe is. The recommended range of grating parameters was also given to attain to an ideal observation result in the paper.
Sub-wavefront Slope Measurement Based on Talbot Effect Moiré Fringe Technology

HOU Chang-lun,XU Jian-feng,BAI Jian,YANG Guo-guang

DOI: https://doi.org/10.3969/j.issn.1003-501x.2007.11.013

2007-01-01

Abstract:In order to complete wavefront accurate measurement of large aperture long focal lens, a method for sub-wavefront slope of large aperture lens measurement based on Talbot effect moire fringe technology is presented. When a Ronchi grating is illuminated by a sub-aperture beam, Talbot image can be obtained at periodic distance behind the Ronchi grating. If another Ronchi grating is put at the location of the Talbot image, moire fringe will appear behind this grating. Moire fringe moves sensitively when the slope of the illuminating sub-aperture beam changes slightly, so the slope of sub-aperture beam can be measured accurately by counting the number of the shifted moire fringe. The formula of calculating the angle of sub-wavefront slope from the shifted moire fringe numbers is derived. The experiment data is consistent with the theoretical analysis very well. This method can be applied to the sub-wavefront slope testing with high accuracy.
Research on the Moiré fringes formed by circular and linear grating

Xiaoyu Chen,Jinbo Su,Xiangqun Cao,Bin Lin,Bo Yuan

DOI: https://doi.org/10.3788/COL201109.S10702

IF: 2.56

2011-01-01

Chinese Optics Letters

Abstract:The features of Moiré fringe generated by overlapping a circular and a linear grating are studied. Given that the pitch of circular grating is a and that of linear grating is P, the shapes of the Moiré fringe that they form are hyperbola, parabola, and ellipse when a > P, a=P, and a < P, respectively. As the pitches of these two gratings become close to each other, the magnification of the Moiré fringe is over 100, which is useful for the measurement of small displacement. This letter also discusses how the fill factor influences Moiré fringe visibility. © 2011 Chinese Optics Letters.
Calibration Method for Angular Measurement of Moiré Patterns

Fan He,Jian Bai,Kaiwei Wang,Xiyun Hou,Yao Jiang

DOI: https://doi.org/10.1117/12.2070535

2014-01-01

Abstract:In this paper, a high-accuracy calibration method for angular measurement of deformed and curved Moire patterns, based on template matching algorithm, is presented. We report a feasible and accurate method, based on Talbot interferometry and Moire deflectometry, to measure long focal-length lenses. Theoretical analysis indicates that the precision of this method is mainly influenced by the angle of Moire patterns. However, it's difficult to obtain high-accuracy angle of Moire patterns, since the Moire patterns derived from experiment are constantly deformed or curved. We demonstrate a method, based on template matching algorithm, to calibrate deformed and curved Moire patterns, thus their angle can be calculated fast and accurately in sub-pixel domain. Numerical analysis and simulation prove that the method mentioned above demonstrates high precision and stability, and experiment results show that the accuracy of the long focal lengths measurement is improved obviously.
A New Subdivision Technique For Grating Based On Cmos Microscopic Imaging

Bo Yuan,Huimin Yan,Xiangqun Cao,Bin Lin,袁波,严惠民,曹向群,林斌

IF: 2.56

2007-01-01

Chinese Optics Letters

Abstract:We propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle axe theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm. and the maximum displacement error is less than 0.4 mu m. The factors contributing to the systemic error are also discussed.
Analyze and Research the Moire Fringe with Information Entropy Theory

Honglei Yu,Xiaorong Jin,Jian Bai,Hao Hu

DOI: https://doi.org/10.1117/12.965545

2012-01-01

Abstract:To improve the accuracy of the measuring system of long focal length, the coordinate of the special spectrum point should be found. In this paper a method based on information entropy is proposed, the feasibility of the method is proved in mathematics, analysis of the moire fringes and the result of the two-dimensional FFT of moire fringes is presented, the process of finding the exactly coordinate of the frequency domain, which is based on the method, is shown. We also demonstrate an application of the method to the measuring system, and numerical result of the experiment could prove that the accurate of the system is significantly improved.
Theory Study of a New Nanometrology Grating

Xiushui Ma,Yetai Fei,Xiaohuai Chen,Jing Zhao

DOI: https://doi.org/10.3321/j.issn:0254-3087.2006.02.012

2006-01-01

Abstract:In order to develop metrological grating with nanomeasurement precision, which has simple structure, high performance on anti-interfere, the measurement principle of nanomeasurement precision grating is analyzed based on two times' Moiré fringe, its resolution can achieve 5.40 × 10-10 m, and the measurement precision can achieve nanometer through simulated calculation. Furthermore, it discusses the effects of two times'Moiré fringe when the indicator grating and the scales grating are not parallel.
An Experimental Study on Digital Nano-Moire Method

刘战伟,谢惠民,方岱宁,戴福隆,郭海明,刘洪,高鸿钧,薛其坤

DOI: https://doi.org/10.3321/j.issn:1002-1582.2004.01.004

2004-01-01

Optical Technique

Abstract:A new digital nano-moire method for measuring nanometer-deformation is proposed. In measurement, periodic crystal lattices of crystal materials and atoms structure of the reconstructed surface of some FCC transition and noble metals are acted as specimen gratings, whose pitches are up to nanometer and sub-nanometer. Sine digital grating (computer generated grating) is acted as reference grating. The formation mechanism of digital nano-moire fringe and the design project of sine digital grating are discussed. In addition, the displacement and strain measurement principle, phase shifting technique and multiplication method of fringe are presented.
Deformation analysis of MEMS structures by modified digital moiré methods

Zhanwei Liu,Xinhao Lou,Jianxin Gao

DOI: https://doi.org/10.1016/j.optlaseng.2009.12.007

IF: 5.666

2010-01-01

Optics and Lasers in Engineering

Abstract:Quantitative deformation analysis of micro-fabricated electromechanical systems is of importance for the design and functional control of microsystems. In this paper, two modified digital moiré processing methods, Gaussian blurring algorithm combined with digital phase shifting and geometrical phase analysis (GPA) technique based on digital moiré method, are developed to quantitatively analyse the deformation behaviour of micro-electro-mechanical system (MEMS) structures. Measuring principles and experimental procedures of the two methods are described in detail. A digital moiré fringe pattern is generated by superimposing a specimen grating etched directly on a microstructure surface with a digital reference grating (DRG). Most of the grating noise is removed from the digital moiré fringes, which enables the phase distribution of the moiré fringes to be obtained directly. Strain measurement result of a MEMS structure demonstrates the feasibility of the two methods.
The Technique for Fabricating Submicron Moiré Grating Using FIB Milling

Huimin Xie,Yanjie Li,Hua Du,Bing Pan,Qiang Luo,Changzhi Gu,Haichang Jiang

DOI: https://doi.org/10.4028/www.scientific.net/amr.47-50.710

2008-01-01

Advanced Materials Research

Abstract:In this study, focused gallium ion (Ga+) beam is utilised to fabricate micro/submicron spacing gratings on specimen surface. The grating types include: parallel, cross, and hybrid (grating with double-frequency). Several hybrid gratings with double frequency were produced in combination mode or superposition mode, which have a good potential to measure deformation within different range. Techniques for producing different type of gratings are discussed in detail. As an application, a 5000 lines/mm grating was fabricated on an amorphous SIC MEMS cantilever and was successfully used to measure its virtual strain with aid of digital moiré. The experimental results verify the feasibility of fabricating high frequency grating on metal or non-metal surface using the FIB milling and the resultant grating can be used to measure micro-deformation.
Moire deflectometry based on Fourier-transform analysis

Boxiong Wang,Xiuzhi Luo,T. Pfeifer,H. Mischo

DOI: https://doi.org/10.1016/S0263-2241(99)00009-3

IF: 5.6

1999-01-01

Measurement

Abstract:An approach for moire deflectometry based on Fourier-transform analysis is described. Fourier-transform is used for analyzing and evaluating both infinite and finite moire deflectograms. Deflections in two orthogonal directions are integrated to reconstruct the tested surface. A least square fitting is used in finite moire deflectogram to eliminate declination error caused by inclination between two Ronchi grating lines. Results from experiments of aspheric surface measurement based on this approach have proved its effectiveness.
Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography.

Shaolin Zhou,Yongqi Fu,Xiaoping Tang,Song Hu,Wangfu Chen,Yong Yang

DOI: https://doi.org/10.1364/OE.16.007869

IF: 3.8

2008-01-01

Optics Express

Abstract:Considering the necessity of alignment in practical applications of photolithography, distribution of complex amplitude of moire fringe patterns that are produced in superposition of two gratings is analyzed in the viewpoint of Fourier Optics and the relationship between fringes and properties of these two gratings is concluded by means of an analysis model. The rule of one-dimensional gratings (1D-gratings) is extended to other form of the gratings which have quasi-periodic repetitive structures. Especially, moire fringes generated by the two superposed 1D-gratings (used in alignment of lithography) can be expressed by an arithmetical operation of two vectors which include enough information about these 1D-gratings. Numerical analyses regarding the moire model and its application in the alignment process of lithography are carried out. Our computational analyses results show that the moire fringes of the two extended gratings can be refined as a transformed fringe pattern of two standard 1D-gratings. Finally, the results also make it out that the fringes which have magnified periods versus that of two 1D-gratings are highly sensitive to relative shift of two gratings thus might be applicable in alignment of lithography or correlated fields. (C) 2008 Optical Society of America.
A study on the digital nano-moiré method and its phase shifting technique

Huimin Xie,Zhanwei Liu,Daining Fang,Fulong Dai,Hongjun Gao,Yapu Zhao

DOI: https://doi.org/10.1088/0957-0233/15/9/007

IF: 2.398

2004-01-01

Measurement Science and Technology

Abstract:A novel digital nano-moire method is proposed to measure the in-plane nanoscopic deformation of an object. In the measurement, the periodic lattice of a single-crystal material acts as a specimen grating while a digital reference grating (DRG) is prepared by computer software. These two gratings overlap to generate a moire fringe pattern. The preparation of the grating, the formation principle of digital nano-moire fringes and its relative phase shifting technique are described in detail. A typical experiment was conducted with a highly oriented pyrolytic graphite (HOPG) sample. The residual deformation of the irradiated HOPG sample was measured using this method. The experiment result verifies the feasibility of this method, and demonstrates the potential for further applications.
Large-deformation analysis in microscopic area using micro-moiré methods with a focused ion beam milling grating

Hua Du,Huimin Xie,Zhiqiang Guo,Bing Pan,Qiang Luo,Changzhi Gu,Haichang Jiang,Lijian Rong

DOI: https://doi.org/10.1016/j.optlaseng.2007.06.002

IF: 5.666

2007-01-01

Optics and Lasers in Engineering

Abstract:In this study, the focused ion beam (FIB) milling method is applied to fabricate sub-micron grating on TiNi shape memory alloy materials. With self-made FIB milling gratings, scanning electron microscope (SEM) micro-moiré and digital moiré methods are successfully used to measure large deformation of porous TiNi shape memory alloys (SMA) in uni-axial compressive tests. The principles of the SEM micro-moiré method and digital moiré method are introduced, and applied to calculate large strain. The full field deformation around shear bands can be measured precisely. During the investigation, the phenomenon of furcated moiré fringes was found, and a corresponding explanation is given in this paper. The furcated fringes are generated in the locations of combined shear bands where sudden changes of strain occur. Successful results also verify that the FIB milling gratings are suitable for micro-moiré measurement and can generate high quality moiré fringes.
A Study on the Digital Moiré Technique with Circular and Radial Gratings

X. L. Li,Y. L. Kang,W. Qiu,Q. H. Qin,X. Xiao

DOI: https://doi.org/10.1016/j.optlaseng.2006.12.004

IF: 5.666

2007-01-01

Optics and Lasers in Engineering

Abstract:A digital moiré technique with circular and radial gratings is proposed to measure in-plane displacement and strain distributions of soft materials in a polar coordinate system. By introducing the coordinate-transform technique, the concentric circles and radial lines in the Cartesian coordinate system are converted to cross gratings in a polar coordinate system. Then, the digital moiré fringes are generated using logical and filter operations on the one-bit binary images. Finally, the in-plane displacement distributions are obtained by means of the four step phase-shifting procedure. Also, the measurement principles and the basic procedures of the new digital moiré technique are explained in detail. An application for rubber sheet with a single-edge crack is studied, and the experimental results show that the presented method is feasible.
Optical Fringe Multiplication Technique with TEM Nano-Moiré Method

HM Xie,ZW Liu,DN Fang,FL Dai,YM Xing,YP Zhao

DOI: https://doi.org/10.1088/0957-0233/16/2/027

2005-01-01

Abstract:In this paper, a nano-moire fringe multiplication method is proposed, which can be used to measure nano-deformation of single crystal materials. The lattice structure of Si (111) is recorded on a film at a given magnification under a transmission microscope, which acts as a specimen grating. A parallel grating (binary type) on glass or film is selected as a reference grating. A multiplied nano-moire fringe pattern can be reproduced in a 4f optical filter system with the specimen grating and the prepared reference grating. The successful results illustrate that this method can be used to measure deformation in nanometre scale. The method is especially useful in the measurement of the inhomogeneous displacement field, and can be utilized to characterize nano-mechanical behaviour of materials such as dislocation and atomic bond failure.
High-Frequency Deformation Grating Fabrication Techniques and Applications

Xianglu Dai,Yanjie Li,Huimin Xie

DOI: https://doi.org/10.1117/12.2074671

2014-01-01

Abstract:The rapid development of micro-electronics and micro-nano material engineering make it an urgent task to characterize the mechanical properties of micro-device and micro-nano material accurately. Due to the advantages of high precision, high sensitivity and full field measurement, moire method has been applied in the micro-deformation measurement widely. Since the grating is the indispensable deformation sensor of moire method, how to fabricate high frequency grating with high quality is the key problem to solve for moire method. In this paper, some fabrication techniques developed recently with their applications will be summarized, including holographic photolithography, electron beam lithography (EBL), focused ion beam (FIB) and nano-imprint lithography(NIL), aiming to popularize the applications of moire method in the micro-deformation measurement and provide some valuable guidelines on how to choose a proper fabrication technique.
Orthogonal Sampling Moiré Method and Its Application in Microscale Deformation Field Measurement

R. Chen,Q. Zhang,W. He,H. M. Xie

DOI: https://doi.org/10.1016/j.optlaseng.2021.106811

IF: 5.666

2022-01-01

Optics and Lasers in Engineering

Abstract:Sampling moire (SM) method is one of the modern deformation measurement methods in photo-mechanics. This method realizes the visualization measurement of deformation field by a sparse sampling of grating images, showing the advantages of high efficiency and strong robustness. However, in the traditional sampling moire method, the unidirectional sampling mode is used with the result that the two-dimensional deformation cannot be acquired at the same time. In this paper, by combining the orthogonal sampling and Fourier phase analysis techniques, an orthogonal sampling moire (OSM) method is proposed with which the two-directional moire phase of specimen grating can be separated synchronously. The accuracy of the OSM method for the deformation measurement is verified by numerical experiments and PMMA uniaxial tensile tests. As an application, in a scanning electron microscope (SEM), the deformation field near the crack tip of small fatigue cracks is measured, based on which the crack opening displacement (COD) and the stress intensity factors (K) are obtained. Furthermore, the crack closure effects at different temperatures are characterized. The experimental results show that the crack closure significantly affects the process of small crack growth at both room temperature and high temperature, and the crack opening load at high temperature is greater than that at room temperature, which indicates that small cracks are easier to close at high temperature.
Micro/Nano Grating and Its Application to Moire Measurement

HM Xie,ZW Liu,HX Shang,QK Xue,JF Jia,DN Fang

DOI: https://doi.org/10.1117/12.621896

2005-01-01

Abstract:In this paper, some novel micro/nano- moire grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moire patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moire methods. The successful experimental results verify the feasibility of these methods.
Micro-Measurement Using Grating Microscopy

B Zhao,A Asundi

DOI: https://doi.org/10.1016/s0924-4247(99)00289-7

2000-01-01

Abstract:In this paper, two quantitative methods to measure micro-deformation using grating microscopy are proposed, a grating diffraction method and a full-field grating phase-shift method. A compact optical transmitting microscope with white light source is reconstructed by developing a loading and recording system. For direct strain measurement, a grating diffraction method is presented. With the help of a Bertrand lens, the Fourier spectrum of the grating is formed on the CCD sensor plane with high image quality. Software for precise, fast and automatic determination of the diffraction spot centroids is developed. Local strains are thus measured with high resolution. For the deformation measurement, a phase-shifting grating microscope method with high sensitivity and spatial resolution is proposed. Phase-shifting is based on the slab refraction effect and is realized via a tilting compensator. The system possesses a high spatial resolution (1 μm), and a displacement precision of 0.1–0.03 μm. The combination of the grating diffraction method and the phase-shifting method in the same test provides simultaneous measurement of strain and displacement, thus demonstrating that the grating techniques are viable in the microscope environment.

Grating Fourier Analysis and Computer Moiré Technique

S5-5 research on the moiré fringes formed by circular grating and linear grating

Sub-wavefront Slope Measurement Based on Talbot Effect Moiré Fringe Technology

Research on the Moiré fringes formed by circular and linear grating

Calibration Method for Angular Measurement of Moiré Patterns

A New Subdivision Technique For Grating Based On Cmos Microscopic Imaging

Analyze and Research the Moire Fringe with Information Entropy Theory

Theory Study of a New Nanometrology Grating

An Experimental Study on Digital Nano-Moire Method

Deformation analysis of MEMS structures by modified digital moiré methods

The Technique for Fabricating Submicron Moiré Grating Using FIB Milling

Moire deflectometry based on Fourier-transform analysis

Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography.

A study on the digital nano-moiré method and its phase shifting technique

Large-deformation analysis in microscopic area using micro-moiré methods with a focused ion beam milling grating

A Study on the Digital Moiré Technique with Circular and Radial Gratings

Optical Fringe Multiplication Technique with TEM Nano-Moiré Method

High-Frequency Deformation Grating Fabrication Techniques and Applications

Orthogonal Sampling Moiré Method and Its Application in Microscale Deformation Field Measurement

Micro/Nano Grating and Its Application to Moire Measurement

Micro-Measurement Using Grating Microscopy