Abstract:There are a range of different methods to generate a nanostructured surface on silicon (Si) but the most cost effective and optically interesting is the metal assisted wet chemical etching (MACE) (Koynov et al 2006 Appl. Phys. Lett. 88 203107). MACE of Si is a controllable, room-temperature wet-chemical technique that uses a thin layer of metal to etch the surface of Si, leaving behind various nano- and micro-scale surface features or 'black silicon'. MACE-fabricated nanowires (NWs) provide improved antireflection and light trapping functionality (Toor et al 2016 Nanoscale 8 15448-66) compared with the traditional 'iso-texturing' (Campbell and Green 1987 J. Appl. Phys. 62 243-9). The resulting lower reflection and improved light trapping can lead to higher short circuit currents in NW solar cells (Toor et al 2011 Appl. Phys. Lett. 99 103501). In addition, NW cells can have higher fill factors and voltages than traditionally processed cells, thus leading to increased solar cell efficiencies (Cabrera et al 2013 IEEE J. Photovolt. 3 102-7). MACE NW processing also has synergy with next generation Si solar cell designs, such as thin epitaxial-Si and passivated emitter rear contact (Toor et al 2016 Nanoscale 8 15448-66). While several companies have begun manufacturing black Si, and many more are researching these techniques, much of the work has not been published in traditional journals and is publicly available only through conference proceedings and patent publications, which makes learning the field challenging. There have been three specialized review articles published recently on certain aspects of MACE or black Si, but do not present a full review that would benefit the industry (Liu et al 2014 Energy Environ. Sci. 7 3223-63; Yusufoglu et al 2015 IEEE J. Photovolt. 5 320-8; Huang et al 2011 Adv. Mater. 23 285-308). In this feature article, we review the chemistry of MACE and explore how changing parameters in the wet etch process effects the resulting texture on the Si surface. Then we review efforts to increase the uniformity and reproducibility of the MACE process, which is critical for commercializing the black Si technology.

MACE Texture Optimization for Mass Production of High-Efficiency Multi-Crystalline Cell and Module

Constructing Submicron Textures on Mc-Si Solar Cells Via Copper-Catalyzed Chemical Etching

A Metal-Free Additive Texturization Method Used for Diamond-Wire-sawn Multi-Crystalline Silicon Wafers

Effect of Additives on Making Texture Surface on Multicrystalline Silicon Wafer by Diamond Wire Sawing

Improvement of conversion efficiency of multicrystalline silicon solar cells by incorporating reactive ion etching texturing

Nanostructured silicon via metal assisted catalyzed etch (MACE): chemistry fundamentals and pattern engineering

Surface damage and metal-catalyzed chemical etching investigation of multicrystalline silicon by diamond wire sawing

Advanced textured monocrystalline silicon substrates with high optical scattering yields and low electrical recombination losses for supporting crack‐free nano‐ to poly‐crystalline film growth

An Innovative Light Trapping Structure Fabrication Method on Diamond-Wire-Sawing Multi-Crystalline Silicon Wafers

TEXTURIZATION OF MONOCRYSTALLINE SILICON FOR SOLAR CELLS

Texturization of Cast Multicrystalline Silicon for Solar Cells

Investigations on the Influence of Surface Textures on Optical Reflectance of Multi-crystalline Silicone (MC-Si) Crystal Surfaces-Simulations and Experiments

Influence of micro-texture sizes towards light absorption improvement in hybrid microtextured/nanotextured black silicon for solar cells

Surface Texturing of Silicon Wafers by Two-step Ag-assisted Etching Process with New NSR Solution

The Modulation of Surface Texture for Single-Crystalline Si Solar Cells Using Calibrated Silver Nanoparticles As a Catalyst

Micro-textures for Efficient Light Trapping and Improved Electrical Performance in Thin-Film Nanocrystalline Silicon Solar Cells

Optimization of the Surface Structure on Black Silicon for Surface Passivation

INFLUENCE OF SUB-SURFACE DAMAGE ON TEXTURING OF MONOCRYSTALLINE SILICON WAFERS FOR SOLAR CELLS

An Artificial-Intelligence-Assisted Investigation on the Potential of Black Silicon Nanotextures for Silicon Solar Cells

Surface Molecular Engineering for Fully Textured Perovskite/Silicon Tandem Solar Cells

Ultrafast Random‐Pyramid Texturing for Efficient Monocrystalline Silicon Solar Cells