High‐Resolution Monolithic Integrated Tribotronic InGaZnO Thin‐Film Transistor Array for Tactile Detection
Yuanzhi Cao,Tianzhao Bu,Chunlong Fang,Chao Zhang,Xiaodong Huang,Chi Zhang
DOI: https://doi.org/10.1002/adfm.202002613
IF: 19
2020-07-09
Advanced Functional Materials
Abstract:<p>Tactile detection is a crucial technology in many fields, such as electronic skin, touch screen control, human prostheses, and screen fingerprint identification. Tribotronics has demonstrated active mechanosensation from external mechanical stimuli, which greatly enriches the sensing mechanisms of tactile detection. In this work, a monolithic integrated indium‐gallium‐zinc‐oxide (InGaZnO or IGZO) thin‐film transistor (TFT) array is developed for high‐resolution tactile detection. By using the conventional semiconductor fabrication processes, each IGZO TFT cell in the array shows uniform electrical performance. In addition, the drain–source current can be individually tuned by the electrostatic potential generated by the contact electrification between a movable gate and the gate dielectric. The monolithic integrated array displays a relatively high resolution of 12 pixels per inch and can realize a millimeter‐level tactile perception and motion tracking. This work presents a facile and viable strategy toward micro/nano‐scale tribotronics, which can realize high‐resolution and large‐scale tactile detection.</p>
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology