Abstract:Efficient fiber-chip coupling interfaces are critically important for integrated photonics. Since surface gratings diffract optical signals vertically out of the chip, these couplers can be placed anywhere in the circuit allowing for wafer-scale testing. While state-of-the-art grating couplers have been developed for silicon-on-insulator (SOI) waveguides, the moderate index contrast of silicon nitride (SiN) presents an outstanding challenge for implementing efficient surface grating couplers on this platform. Due to the reduced grating strength, a longer structure is required to radiate the light from the chip which produces a diffracted field that is too wide to couple into the fiber. In this work, we present a novel grating coupler architecture for silicon nitride photonic integrated circuits that utilizes an amorphous silicon (α-Si) overlay. The high refractive index of the α-Si overlay breaks the coupler's vertical symmetry which increases the directionality. We implement subwavelength metamaterial apodization to optimize the overlap of the diffracted field with the optical fiber Gaussian mode profile. Furthermore, the phase of the diffracted beam is engineered to focalize the field into an SMF-28 optical fiber placed 55 μm above the surface of the chip. The coupler was designed using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations supported by genetic algorithm optimization. Our grating coupler has a footprint of 26.8 × 32.7 μm 2 and operates in the O -band centered at 1.31 μm. It achieves a high directionality of 85% and a field overlap of 90% with a target fiber mode size of 9.2 μm at the focal plane. Our simulations predict a peak coupling efficiency of − 1.3 dB with a 1-dB bandwidth of 31 nm. The α-Si/SiN grating architecture presented in this work enables the development of compact and efficient optical interfaces for SiN integrated photonics circuits with applications including optical communications, sensing, and quantum photonics.

SiNx-Si Interlayer Coupler Using a Gradient Index Metamaterial

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

A Nonreciprocal Add-Drop Multiplexer Based on Grating Assisted Couplers

High-Efficiency Metamaterial-Engineered Grating Couplers for Silicon Nitride Photonics

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Tri-layer Gradient and Polarization-Selective Vertical Couplers for Interlayer Transition.

High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics

Low-loss Grating Coupler with a Gradient Index-Matching Subwavelength Structure

High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

MEMS compatible micro-GRIN lenses for fiber to chip coupling of light

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

High-Performance Vertical Interlayer Coupler for Multilayer Silicon Nitride-on-Silicon Photonic Platform