NIR Photodetector Based on Nanosecond Laser-Modified Silicon

Ji-Hong Zhao,Chun-Hao Li,Xian-Bin Li,Qi-Dai Chen,Zhan-Guo Chen,Hong-Bo Sun
DOI: https://doi.org/10.1109/ted.2018.2869912
IF: 3.1
2018-01-01
IEEE Transactions on Electron Devices
Abstract:A crystalline silicon (Si) surface was modified using nanosecond laser pulses in an argon atmosphere. The laser-modified Si (M-Si) samples have a higher performance and thermostable absorption in the broadband range (400-2400 nm) than conventional Si. The concentration of carrier electrons in the M-Si layer is at least five orders of magnitude greater than the carrier concentration of the Si substrate. Using the N+-N- junction formed between the M-Si layer and the Si substrate, visible and near-infrared (VIS-NIR) M-Si photodetectors are made. The N+-N- photodiode has good rectification characteristics and a high photoresponse to the subbandgap NIR light at 1310 nm. At the same time, the M-Si photodetector at a low reverse bias shows a large gain to the VIS-NIR light above the bandgap. By comparing the response time of the M-Si photodetector to the light of 900 and 1310 nm, the response speed of the device to the photon above-bandgap energy is faster.
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