Inkjet Printed Electrodes in Thin Film Transistors

Ruiqiang Tao,Honglong Ning,Jianqiu Chen,Jianhua Zou,Zhiqiang Fang,Caigui Yang,Yicong Zhou,Jianhua Zhang,Rihui Yao,Junbiao Peng

DOI: https://doi.org/10.1109/jeds.2018.2852288

2018-01-01

IEEE Journal of the Electron Devices Society

Abstract:Inkjet printing is a non-vacuum, non-contact, low-cost, and direct patterning thin film deposition technique. Compared to traditional processes, it demands less materials and energy, simplifies processing steps and is compatible with the fast fabrication of flexible and large-size devices, thus potential in the application of thin film transistors. In this paper, we have compared the main techniques of inkjet printing, and discussed the formulation of conductive inks, the deposition of high quality electrodes, and the obtaining of high resolution and high performance thin film transistors. Moreover, the faced problems and corresponding solving methods of inkjet printed thin film transistor with low sintering temperature, small line width, short channel, high mobility, and designed structure are summarized by the understanding of the interaction among inkjet printing devices, materials, processes, and the fabrication of transistors, which providing referential significance of the following research effort.