Fabrication and characterization of a wide-bandgap and high-Q terahertz distributed-Bragg-reflector micro cavities

Yao Yu,Jinhua Cai,Jiandong Sun,Zhipeng Zhang,Hua Qin
DOI: https://doi.org/10.1016/j.optcom.2018.05.010
IF: 2.4
2018-01-01
Optics Communications
Abstract:We report high-Q and wide-bandgap distributed-Bragg-reflector (DBR) ‘micro’ cavities with a single mode frequency around 1 THz by stacking alternatively predefined quartz discs and gaskets. Semi-finished precision crystalline quartz discs for commercial quartz oscillators with two different thicknesses were carefully chosen to form quarter-wavelength Bragg mirrors and DBR cavities. Characterizations of DBR cavities by terahertz time-domain spectroscopy and continuous-wave transmission measurements agree well with transfer-matrix-method (TMM) simulations. The made DBR cavities yielded a quality factor as high as 1, 560 at 0.907 THz with a bandgap of 420 GHz from 0.68 to 1.10 THz. The stacking method was adopted to form DBR cavities with an even higher Q factor by using quarter-wavelength high-resistivity silicon slabs and gaskets. Such stacking method allows for reliable and versatile integration of terahertz Bragg mirrors and DBR cavities with active terahertz devices such as modulators, emitters and detectors. Limited by the penetration depth of terahertz field in Bragg mirrors, the effective mode volume is slightly less than half of the resonant wavelength. Further reduction of the mode volume could be achieved by field enhancement and/or localization within the cavity.
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